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Micropositioners, Micropositioning Stages, Precision YY-Tables, Motion Stage Systems Nanopositioning and more... |
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| PI provides a large variety of high-quality X, XY, and XYZ micropositioninong stages, for industrial customers, OEM and research. Both micropositioning and nanopositioning stages are offered. In addition to motorized micropositioners and Hybrid Piezo/Servo Motor Linear Translation stages the largest selection of Hexapod six-axis micropositioning stages are offered.
Linear micropositioners, XY-tables and rotary positioners can be combined into multi-axis systems. Piezo drives are available for upgrading the stages to providing better than 1nanometer resolution.
If speed and small dimensions are essential, piezo linear motor drives are often the best choice. |
Hexapod Six-Axis
Micropositioners |
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Automation
Actuators |
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Voice Coil
Scanning Stages |
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XYZ Gantry
Stage Micropositioners |
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Rotary Tables
& Tilt Stages |
6º of Freedom
Vacuum Compatible
Capacity: To 200 kg
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Travel: 10 mm-50 mm
Forces to 30 N
Resolution to 50nanometer
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Scanning Frequency : 10s of Hz
Velocity to 240 mm/s
Travel: 20 mm / 6 mm
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Direct Drive Linear Motors
Fast: to 2m/sec
Travel: up to 2m
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Forces to 100 kN
Sub-nm Resolution
Quick Response
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| Motorized Linear Slides |
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Motorized
Micro-Stages |
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Piezo Linear Motor Positioners |
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Motion
Controllers |
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Piezo Nano Positioning
Stages |
ActiveDrive™ Motor
Lead- or Ball- Screw
Drive
Travel: 5 to 306 mm
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Miniature Stages
Lead- or Ball- Screw
Drive
Travel: to 25 millimeter or 360°
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Fast Scanning
Ultrasonic Motor Drives
Compact
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Servo/Stepper/
Piezomotor Options
1-18 Channel Options
PC-Card, OEM /
Rack-mount
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1-6 Axis
Sub-nm precision
Low-Profile Options
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Linear Translation Stages
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M-122 Fast Miniature Micropositioner Stage w/ Integrated Optical Linear Encoder
- Motion Range 25 millimeters
- 0.1 micrometer Optical Linear Encoder for Highest Accuracy & Repeatability
- Min. Incremental Motion to 0.2 micrometer
- Max. Velocity 20 millimeters/s
- Cross-Roll Bearings
- Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
More on Miniature Linear Stages
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- Travel Ranges to 2m
- Direct Drive Linear Motors
- XY and XYZ (3-Axis) Gantry Stages
- Max. Velocity 2m/s
- Closed-Loop Linear Motors with Position Feedback
- For Inspection, 3D Printing, Laser Machining, etc
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- 10mm Travel Ranges
- Compact Design
- Zero Wear Air Bearings
- Max. Velocity 450mm/sec
- Closed-Loop Direct Drive Linear Motors with Position Feedback
- For Alignment, Scanning, etc
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M-110.2 - M-112.2 High-Resolution Miniature Micropositioner Stages w/ Ballscrew Drive
- Motion Ranges 5, 15 and 25 millimeters
- MTBF 5000 h
- Very Cost Effective
- Min. Incremental Motion to 50nanometer
- Max. Velocity 2 millimeters/s
- Closed-Loop Servo Motors and Stepper Motors
- Non-Contacting Limit Switches and Home Switches
- Optional Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
- Vacuum-Compatible Versions Available to 10-6 hPa
More on Miniature Linear Stages
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M-663 PILine® Compact Micropositioner Stages w/ Closed-Loop Ultrasonic Piezo Linear Motors
- Smallest Translation Stage w/ Closed-Loop Linear Motor Drive and Linear Encoder
- 20 millimeters Motion Range
- Velocity up to 500 millimeters/s
- Accelerations up to 20 g
- Resolution to 0.1 Micron
- Integrated Direct-Metrology Linear Encoder
- AutoLock Feature
- X-Y Combinations Available
- 20,000 h MTBF
- Vacuum Versions Available
More on Miniature Linear Stages
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PILine® Miniature Micropositioning Stages w/ Closed-Loop Ultrasonic Piezo Linear Motors
- Motion Range 25 millimeters
- Max. Velocity 400 millimeters/s
- Ultra-Low Profile, 15 millimeters
- Direct Metrology Linear Encoder w/ 0.1 micrometer Resolution
- High Guiding Accuracy w/ Cross Roller Bearings
- Compact X-Y Combinations
- Piezo Linear Motor w/ 6 N Drive Force
- Self Locking at Rest
More on Miniature Linear Stages
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Miniature Micropositining Stages w/ Piezo Linear Motors
- Compact Translation Stage w/ High-Speed Linear Motor Drive
- 20 millimeters Motion Range
- Velocity to 500 millimeters/s
- Acceleration to 20 g
- Resolution to 50 Nanometer
- Self-Locking
- X-Y-Combinations Available
- 20000 h MTBF
- Vacuum Versions to 10-7 hPa
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More on Miniature Linear Stages
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Compact Closed-Loop Translation Stage w/ High-Force Powerful Piezomotor Drive
- Max. Velocity 350 millimeters/s
- Low Profile: Only 21 millimeters Height
- Compact X-Y Combination Possible
- Up to 6 N Force Generation
- Direct Metrology Linear Encoder, 0.1 micrometer Resolution
- Motion Range 50 millimeters
- Excellent Guiding Accuracy Through Cross Roller Bearings
- PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
- Self-Locking at Rest
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M-686 Low-Profile XY-Table with Open-Frame Piezomotor, Linear Encoders
- Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 millimeters/s
- 25 x 25 millimeters Motion Ranges
- Integrated Linear Encoders w/ 0.1 micrometer Resolution
- Compact Design; 27 millimeters Profile Height, 150 x 150 millimeters Footprint
- Large Open Aperture 78 x 78 millimeters, 66 x 66 millimeters in Extreme Position
- Self-Locking at Rest
- Compatible w/ PI Piezo Nanopositioning / Scanning Stages
More on High Precision XY-Tables
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Ultra-High-Precision, Side-Drive Stages w/ Magnetic-Kinematic Bearings
- Motion Range to 15 millimeters
- Compact Side Drive
- Straightness/Flatness ≤ 0.2 Micron
- PZT Drive for Scanning and Tracking
Applications
- 0.1 Micron Resolution w/ Closed-Loop Servo Motor
- 5 Nanometer Resolution w/ Closed-Loop PZT
Drive
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Ultra-High-Precision, Side-Drive Stages w/ Magnetic-Kinematic Bearings
- Motion Range 25 millimeters
- Compact Side Drive
- Straightness/Flatness ≤0.3 Micron
- PZT Drive for Scanning and Tracking Applications
- 0.1 Micron Resolution w/ Closed-Loop Servo Motor
- 5 Nanometer Resolution w/ Closed-Loop PZT Drive
- 30 millimeters Ř Open Aperture
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M-126 Translation Stages w/ Cross Roller Bearings
- To 25 millimeters Motion Range
- Manual, DC-Servo and Stepping-Motor Drives
- ActiveDrive™ Option
- Choice of of Motion Controllers
- Cross Roller Bearings
- <0.1 Micron Resolution
- X-Y and X-Y-Z Combinations
- Direction-Sensing Origin Switch
- Non-Contacting Limit Switches
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M-403 High-Resolution Translation Stages w/ Stepper and Servo Motor Drives
- Cost-Effective Design
- Modular System w/ 4 Series: M-403, M-404, M-413, M-414
- Preloaded Leadscrews or Recirculating Ball Screws
- Motion Ranges from 25 to 300 millimeters
- Stress-Relieved Al Base 80 and 120 millimeters Width
- Smallest Measured Motion Step Size to 0.1 Micron
- Resolution to 0.017 Micron
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M-400 Series High-Precision Miropositioner Stages w/ Cross Roller Bearings
- Motion Ranges to 150 millimeters
- Stress-Relieved Al Stage Base for Long Term Stability
- Cross Roller Bearings
- Manual, DC-Servo and Stepping-Motor Drives, ActiveDrive™ Option
- Coice of Motion Controllers
- Manual Knob for Convenient Position
Adjustment
- Non-Contact Direction-Sensing Origin Switch
- Non-Contacting Limit Switches
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M-605 Ultra-Compact, High-Accuracy Translation Stages
- Integrated Linear-Scale Encoders for Highest
Accuracy
- Motion Ranges 25 millimeters (1") and 50 millimeters (2")
- Velocity up to 50 millimeters/sec.
- Active Drive™ Motors
- Coice of Motion Controllers
- Stress-Relieved Al Stage Base for
Highest Stability
- No-Backlash Recirculating Ballscrews
- Non-Contact, Direction-Sensing Origin Switch
- Non-Contacting Limit Switches
- Load Capacity 20 kg
- >20,000 Hours MTBF
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M-505 Low-Profile Miropositioner Stages w/ Ballscrew Drives
- Motion Ranges to 150 millimeters (6 inches)
- Velocity up to 50 millimeters/sec.
- ActiveDrive™ Motors
- Choice of of Motion Controllers
- Stress-Relieved Al Stage Base for
Highest Stability
- No-Backlash Recirculating Ballscrews
- Non-Contact Direction-Sensing Origin Switch
- Non-Contacting Limit Switches
- Load Capacity 100 kg
- > 20,000 Hours MTBF
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High Load Low-Profile, Linear Translation Stages w/ Ballscrew
- Motion Ranges to 306 millimeters (12")
- Velocity up to 125 millimeters/sec.
- ActiveDrive™ Motors
- Coice of Motion Controllers
- Linear-Scale Encoders for Highest Accuracy
- Stress-Relieved Al Stage Base for Highest Stability
- No-Backlash Recirculating Ballscrews
- Non-Contacting Origin and Limit Switches
- PIIntelliStage™ Version w/ Integrated
Controller
- Load Capacity 100 kg
- >20000 Hours MTBF
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Voice-Coil, Long-Travel, High-Dynamics Scanning System
- Fast Scanning and Positioning
- Scanning Frequency 10s of Hz
- Motion Ranges of 5, 10, 20 millimeters
- Velocity up to 250 millimeters/sec
- Linear Encoder 20nm Resolution
More on Voice-Coil Stages and Voice Coil Actuators
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Actuator & Micrometer Drives |
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M-227 High-Resolution Servo Motorized Positioner
- 10, 25 & 50 millimeters Motion Ranges
- 0.05 Micron Smallest Measured Motion Step Size
- Non-Rotating Tip
- Closed-Loop Servo Motor
- Choice of of Motion Controllers
- Sub-Nanometer Resolution w/ Optional PZT Drive
- >5,000 Hours
MTBF
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M-228 - M-229 Stepper-Mikrometer Linear Actuators w/ Limit Switches
- Cost-Efficient Design
- To 10 millimeters or to 25 millimeters Motion Range
- 46nanometer Resolution (w/ C-663 Controller)
- 50 N Load Capacity
- Non-Rotating Tip
- Max. Velocity 1.5 millimeters/s
- Non-Contacting Limit Switches and Home Switches Compact Design
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M-230 High-Resolution Closed-Loop Servo and Stepper Actuators
- 10 & 25 millimeters Motion Range
- 0.05 Micron Smallest Measured Motion Step Size
- Non-Rotating Tip
- Velocity to 2 millimeters/sec.
- Closed-Loop Servo Motors and Stepper Motors
- Coice of Motion Controllers
- Integrated Hall-Effect Origin and Limit
Switches
- Front Mount or Clamp Mount
- >5,000 Hours MTB
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M-231 High-Resolution Closed-Loop Servo Motorized Positioner
- 17 millimeters Motion Range
- 0.1 Micron Smallest Measured Motion Step Size
- Velocity up to 2.5 millimeters/sec.
- Closed-Loop Servo Motor
- Coice of Motion Controllers
- Integrated Hall-Effect Origin and Limit
Switches
- Fits M-105 & F-110 Fiber Aligners
- >5,000 Hours
MTBF
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M-232 Compact, High-Resolution, Closed-Loop DC-Micrometer Actuator
- 17 millimeters Motion Range
- 0.1 Micron Smallest Measured Motion Step Size
- Velocity up to 2.5 millimeters/sec.
- Closed-Loop Servo Motor
- Choice of of Motion Controllers
- Integrated Hall-Effect Limit Switches and Home Switches
- Fits M-105 & F-110 Fiber Aligners
- >5,000 Hours
MTBF
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M-235 Heavy-Duty High-Resolution Closed-Loop Servo & Stepper Actuators
- 20 millimeters or 50 millimeters Motion Range
- 0.1 Micron Smallest Measured Motion Step Size
- High-Speed Direct Drive Option
- 120 N Push/Pull Load
- 100 N Lateral Load Limit
- Preloaded Ultra-Low-Friction Ball Screw w/ Non-Rotating Tip
- Closed-Loop Servo Motors and Stepper Motors
- Choice of of Motion Controllers
- Integrated Hall-Effect Limit & Origin Switches
- >20,000 Hours MTBF
- Vacuum Versions
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M-238 Heavy-Duty Servo Motorized Linear Actuator
- High Load Capacity to 400 N
- Optional 0.1 Micron Direct Metrology Linear Encoder for Exceptional Precision
- Motion Range to 50 millimeters
- Smallest Measured Motion Step Size to 0.3 Micron
- Max. Velocity: 30 millimeters/s
- Preloaded Frictionless Ball Screw
- MTBF > 20.000 h
- Vacuum-Compatible Versions Available for 10-6 hPa
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RodDrive Integrated Piezo Linear Motor Drive
- Drive-Component for Integration into Micropositioning Systems
- Flexible Choice of Motion Ranges to Several 100 millimeters
- Flexible Choice of Push/Pull Forces to Several 10 N
- Smallest Measured Motion Step Size to 0.05 Micron
- Velocity to 400 millimeters/s
- Self-Locking
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P-853 - P-854 PiezoMikrometer: Piezoelectric Micrometer Drive
- Alternative for Standard Micrometer Drives
- Manual Travel to 18 millimeters
- Piezoelectric High-Resolution Travel to 25 Micron
- Sub-Nanometer Resolution
- Dynamic Operation to 10 Hz
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N-111 Miniature High-Accuracy Piezo Motor Nanopositioning Actuator
- Motion Range 10 millimeters
- Resolutionto 0.025nanometer
- Open-Loop,
5 nanometer Closed-Loop
- Up To 50 N Force Generation and 70 N Holding Force
- Self Locking at Rest, No Heat Generation
- Non-Magnetic and Vacuum-Compatible Working Principle
- Cleanroom Compatible
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N-216 High-Force Piezo Nanopositioning Linear Motor Actutators
- Winner of the SEMI Technology Innovation Showcase Award
- 20 millimeters Motion Range, <0.1 Nanometer Resolution (Open-Loop)
- Integrated High-Resolution Incremental Encoder (Closed-Loop)
- Active Force Generation to 400 N
- >800 N Holding Force,
Self-Locking
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High-Resolution Stepping-Motor Actuators
- 10, 25 & 50 millimeters Motion Ranges
- Resolution <0.1 Micron
- 2- Stepper Motor
- Manual Positioning Knob
- Sub-Nanometer Resolution w/ Optional PZT Actuator
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| Vertical Translation Stages |
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M-501 Vertical Precision Positioner Stage
- Motion Range 12.5 millimeters (1/2")
- Ultra-High-Resolution Encoder
- ActiveDrive™ Motor
- Choice of of Motion Controllers
- Stress-Relieved Al Stage Base for Long Term Stability
- No-Backlash Recirculating Ballscrews
- Non-Contact Origin and Limit Switches
- >20,000 Hours
MTBF
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| Rotation Stages & Tilt Stages |
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- One- & Two-Axis Tilt Stages
- Zero Backlash
- Sub-microradian Resolution
- Piezo, Voice Coil and Linear Motor Motor Drives
- Coice of Motion Controllers
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M-660 PILine® Rotation Stage Fast Positioning, Ultra-Low Profile
- Unlimited Motion Range
- Max. Velocity 720 °/s
- Low Profile: Only 14 millimeters in Height
- Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
- Direct Metrology Linear Encoder, 34 µrad Resolution PILine® Direct Drive: Non-Magnetic and Vacuum-Compatible Working Principle
- Compact Combinations w/ Linear Stages
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M-116 Compact Rotary Table , Worm Gear Driven
- Ultra-Compact Design
- Continuous Rotation
- 2.5 microradian Design Resolution
- Open Aperture
- Velocity up to 20 degrees/second
- Preloaded Anti-Backlash Worm Drive
- Fits Directly on M-110 Micro Translation Stages
- Coice of Motion Controllers
- Non-Contact Reference Switch
- Up to 10 microradian Repeatability
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Rotary Table w/ Worm Gear Drive (100 millimeters diameter)
- Ultra-high preciision
- Continuous Rotation
- Preloaded Worm Drive for Zero Backlash
- ActiveDrive™ DC-Motor, Stepping-Motor and Manual Versions
- Choice of of Motion Controllers
- Open Aperture
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Compact Precision Tangent-Arm Rotary Tables, Optional Servo Motor / Piezo Drives
- Sub-Microradian Resolution
- 360o Coarse Range, up to 19o Fine Range w/
<1 microradian Resolution
- Precision Micrometer or Servo Motor Drives
- Piezo Option for High-Resolution Scanning
and Tracking
- Ø 20 millimeters Clear
Aperture
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Precision Tangent-Arm Rotation Tables, Optional Servo Motor and Piezo Drives
- Sub-Microradian Resolution
- 360o Coarse Range, up to 21o Fine Range
- Precision Micrometer or Servo Motor Drives
- Piezo Option for High-Resolution Scanning
and Tracking
- Ø 30 millimeters Open Aperture
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M-060 Rotation Stage, Worm Gear Driven
- Continuous Rotation
- Ultra - high preciision
- Velocity up to 90 deg/sec.
- Preloaded Worm Drive for Zero Backlash
- ActiveDrives™ DC-Motor, Stepping-Motor and Manual Versions
- Coice of Motion Controllers
- Direction - Sensing Origin
Switch
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Motorized Rotation Tables, Worm Gear Driven (60 millimeters diameter)
- Ultra-High Resolution
- Compact Design
- Continuous Rotation Range
- Preloaded Worm Drive for Zero Backlash
- ActiveDrive™ DC-Motor, Stepper Motor and Manual Versions
- Choice of of Motion Controllers
- 20 millimeters ø Open Aperture
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Hexapod Six-Axis Micro-Positioning
Systems |
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- Most-Compact Hexapod in the PI Portfolio
- Motion Ranges 40 x 40 x 13 millimeters, Rotation to 60 Degrees
- Load Capacity to 5 kg
- Resolution of a Single Strut 40 nanometer
- Min. Incremental Motion to 200 nanometer Repeatability up to ±0.5 micrometer
- Velocity to 10 millimeters/s
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M-824 Compact Six-Axis Positioning System
- Six Degrees of Freedom
- Vacuum Compatible Versions
- Load Capacity 10 kg
- Motion Ranges to 45 millimeters (linear), 25°
(rotation)
- 7 Nanometer Resolution
- 300 Nanometer Min. Incremental Motion
- Repeatability ±0.5 Micron
- Very Compact Design
- Self Locking to 10 kg
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M-850 Six-Axis-Parallel Positioner
- Six Degrees of Freedom
- Works in Any Orientation
- No Moving Cables for Improved Reliability and Precision
- 200 kg Load Capacity (Vertical)
- Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
- Repeatability to ±1 Micron
- Actuator Resolution to 0.005 Micron
- Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
- Vacuum-Compatible Versions
- Linear and Rotary Multi-Axis Scans
- Virtualized Center of Rotation (Pivot Point)
- Sophisticated Controller Using Vector Algorithms
- 20000 h MTBF
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M-840 HexaLight™ Six-Axis Positioner
- Six Degrees of Freedom
- Rapid Response
- No Moving Cables for Improved Reliability and Precision
- 10 kg Load Capacity
- Repeatability to ±2 Micron
- Actuator Resolution to 0.016 Micron
- Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
- Vacuum-Compatible Versions
- Virtualized Pivot Point
- Sophisticated Controller Using Vector Algorithms
- 20000 h MTBF
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F-206 6-Axis Precision Fiber Alignment System
- Parallel Kinematics w/ 6 Degrees of Freedom
- Repeatability 0.3 Micron in Space
- 0.033 Micron Actuator Resolution
- No Moving Cables for Improved Reliability, Reduced Friction
- Better Dynamics, More Compact than Serial Kinematics Systems
- For Scanning and Fiber / Photonics Components Alignment
- Cartesian Coordinate Control w/ Randomized Pivot Point.
- Powerful Digital Controller w/ Open Source LabView™ Drivers, DLL Libraries...
- Integrated Fiber Alignment Routines
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P-587 Six-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage w/ Parallel Metrology
- For Scanning and Positioning in all Six Degrees of Freedom
- 800 x 800 x 200 Micron Linear Range
- Up to 10 mad Rotational Range
- Precision Trajectory Control
- Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Direct Metrology w/ Capacitive Sensors for Highest Precision
- ID-Chip for Auto Calibration Function
- PICMA® High - Performance Multilayer Piezo Actuator Drives
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Talk to Your PI Application Engineer Today
for Your Custom or Standard Solution!
Learn about Micropositioning Applicatons on the Tech Blog
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