Bookmark this site
 Deutsch

Download / Support
Technotes

Download a PDF copy of the Latest PI Newsletter
NEXLINE®: High-Load Ceramic Linear Motor / Actuator
Patented New Technology Provides Enhanced Positioning Resolution.
Open-Frame XY Piezo-Motor Stage with Linear Encoders
New Hexapod for Vacuum Application
Low-Profile High-Speed Linear Stage with Linear Encoder Extends Family of PILine® Stages
Micropositioners, Actuators, Piezomotors, Translation & Rotation Stages, Hexapods, Nanopositioning and more...

PI is a leading manufacturer of ultra-precision motion control solutions for OEM and research and offers a large range of Micropositioning and Nanopositioning devices and systems. Our expertise spans from manual actuators to the unique Hybrid DC/PZT Translation stages to Hexapod 6D parallel kinematics micropositioning systems.

All linear and rotary positioners can be arranged to multiaxis combinations and many can be fitted with optional piezo drives with <1 nm resolution.

Our new line of compact Piezo Linear Motors and Translation Stages are the smallest, fastest and most powerful on the market.

Hexapod Six-Axis
Micropositioning
Actuators &
Micrometers
Voice Coil
Scanning Stages
Vertical
Translation Stages
Rotation Stages
& Tilt Stages

6º of Freedom
Vacuum Compatible
Capacity: To 200 kg

Travel: 10 mm-50 mm
Forces to 30 N
Resolution to 50 nm

Scanning Freq:10s of Hz
Velocity to 240 mm/s
Travel: 20 mm / 6 mm

ActiveDrive™ Motor
Fast Response
Travel: to 12.5 mm (1/2")

Forces to 100 kN
Sub-nm Resolution
Fast Response

Linear Translation
Stages
Motorized
Micro-Series
Piezo Linear Motors/Stages Motion
Controllers
Piezo Nanopositioning
Stages

ActiveDrive™ Motor
Lead- or Ball- Screw
    Drive
Travel: 5 to 306 mm

Miniature Stages
Lead- or Ball- Screw
    Drive
Travel: to 25 mm or 360°

Fast Scanning
Ultrasonic Motor Drives
Compact

Servo/Stepper/
    Piezomotor Options
1-18 Channel Options
PC-Card, OEM /
    Rack-mount

1-6 Axis
Sub-nm precision
Low-Profile Options
 

PI is the world leader in parallel kinematics six-axis hexapod precision positioning systems. In addition to multi-axis hexapod micro-robots, PI also offers a wide selection of innovative precision positioning stages for scientific and industrial applications.

Advantages: ultra-compact precision stages; choice of drives (piezo linear motor, voice-coil linear motor, or DC-servo / stepper with ballscrew or leadscrew); choice integration (integrated servo driver, integrated controller); piezo-upgrades.

More Information...

Selection Guides
Hexapods Brochure
Experience / Custom Systems
Reasons for Choosing PI
Test and Quality Control
Precision Miniature Translation Stages Catalog



Linear Translation Stages

Product Image - Fast Miniature Linear Translation Stage with Integrated Optical Linear Encoder

M-122 Fast Miniature Linear Translation Stage with Integrated Optical Linear Encoder


  • Travel Range 25 mm
  • 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
  • Min. Incremental Motion to 0.2 µm
  • Max. Velocity 20 mm/s
  • Cross-Roll Bearings
  • Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - High-Resolution Micro-Translation Stages with Ballscrew Drive

M-110.2 - M-112.2 High-Resolution Micro-Translation Stages with Ballscrew Drive


  • Travel Ranges 5, 15 and 25 mm
  • MTBF 5000 h
  • Very Cost Effective
  • Min. Incremental Motion to 50 nm
  • Max. Velocity 2 mm/s
  • Closed-Loop DC Motors and Stepper Motors
  • Non-Contact Limit and Reference Switches
  • Optional Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
  • Vacuum-Compatible Versions Available to 10-6 hPa
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - PILine Miniature Translation Stages

M-663 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors


  • Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
  • 20 mm Travel Range
  • Velocity up to 500 mm/s
  • Accelerations up to 20 g
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions Available
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image -  PILine Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors

M-664 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors


  • Travel Range 25 mm
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self Locking at Rest
Back to Top Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - PILine Miniature Translation Stages with Ultrasonic Piezo Linear Motors

M-661 - M-662 PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motors


  • Smallest Translation Stage with High-Speed Linear Motor Drive
  • 20 mm Travel Range
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Resolution to 50 Nanometer
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa
Product Description | Specs / Drawings | Ordering Info | PDF


Product Image - PILine Low-Profile Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors

M-683 Compact Closed-Loop Translation Stage with High-Force Powerful Piezomotor Drive


  • Max. Velocity 350 mm/s
  • Low Profile: Only 21 mm Height
  • Compact XY Combination Possible
  • Up to 6 N Force Generation
  • Direct Metrology Linear Encoder, 0.1 µm Resolution
  • Travel Range 50 mm
  • Excellent Guiding Accuracy Through Crossed Roller Bearings
  • PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
  • Self-Locking at Rest

Product Description | Specs / Drawings | Ordering Info | PDF


Product Image - Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders

M-686 Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders


  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
  • 25 x 25 mm Travel Ranges
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
  • Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning Stages

Product Description | Specs / Drawings | Ordering Info | PDF

Product Image -  Series of Miniature Translation Stages

M-311 – M-318 Miniature Translation Stages


  • Extremely Compact
  • All-Stainless-Steel Construction
  • X, XY and XYZ Versions
  • Optional PiezoMike for Nanometer Resolution
  • 4 mm Clear Aperture
  • Linear Ball Bearings
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings

M-011 Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings


  • Travel Range to 15 mm
  • Compact Side Drive
  • Straightness/Flatness ≤ 0.2 Micron
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micron Resolution with Closed-Loop DC Motor
  • 5 Nanometer Resolution with Closed-Loop PZT Drive
Back to Top
Parametric Search      Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings

M-014 Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings


  • Travel Range 25 mm
  • Compact Side Drive
  • Straightness/Flatness ≤0.3 Micron
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micron Resolution with Closed-Loop DC Motor
  • 5 Nanometer Resolution with Closed-Loop PZT Drive
  • 30 mm Ř Clear Aperture
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Translation Stages with Crossed Roller Bearings

M-126 Translation Stages with Crossed Roller Bearings


  • To 25 mm Travel Range
  • Manual, DC-Servo and Stepper-Motor Drives
  • ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Crossed Roller Bearings
  • <0.1 Micron Resolution
  • XY and XYZ Combinations
  • Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - High-Resolution Translation Stages with Stepper and DC Motor Drives

M-403, M-404, M-413, M-414 High-Resolution Translation Stages with Stepper and DC Motor Drives


  • Cost-Effective Design
  • Modular System with 4 Series: M-403, M-404, M-413, M-414
  • Preloaded Leadscrews or Recirculating Ball Screws
  • Travel Ranges from 25 to 300 mm
  • Stress-Relieved Aluminum Base 80 and 120 mm Width
  • Minimum Incremental Motion to 0.1 Micron
  • Resolution to 0.017 Micron
Back to Top
Parametric Search      Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - High-Precision Translation Stages with Crossed Roller Bearings

M-400 Series High-Precision Translation Stages with Crossed Roller Bearings


  • Travel Ranges to 150 mm
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Crossed Roller Bearings
  • Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Manual Knob for Convenient Position Adjustment
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Ultra-Compact, High-Accuracy Translation Stages

M-605 Ultra-Compact, High-Accuracy Translation Stages


  • Integrated Linear-Scale Encoders for Highest Accuracy
  • Travel Ranges 25 mm (1") and 50 mm (2")
  • Velocity up to 50 mm/sec.
  • Active Drive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact, Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 20 kg
  • >20,000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Low-Profile Translation Stages with Ballscrew Drives

M-505 Low-Profile Translation Stages with Ballscrew Drives


  • Travel Ranges to 150 mm (6 inches)
  • Velocity up to 50 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 100 kg
  • > 20,000 Hours MTBF
Back to Top
Parametric Search      Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Low-Profile, High-Load Translation Stages with Ballscrew Drives

M-511 · M-521 · M-531 Low-Profile, High-Load Translation Stages with Ballscrew Drives


  • Travel Ranges to 306 mm (12")
  • Velocity up to 125 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Linear-Scale Encoders for Highest Accuracy
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contacting Origin and Limit Switches
  • PIIntelliStage™ Version with Integrated Controller
  • Load Capacity 100 kg
  • >20000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Voice-Coil Scanning System

M-511.HD Long-Travel, High-Speed Nanopositioning Systems


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 4 Nanometer Linear Encoder Resolution
  • 100 mm Travel
  • Velocities to 125 mm/sec
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments
  • High Drive and Holding Forces with Minimal Power
Back to Top
Parametric Search      Product Description | Specs / Drawings | Ordering Info | PDF
Voice Coil Scanning Stages
Product Image - Voice-Coil Scanning System

V-106 Long-Travel, High-Dynamics Scanning System with Voice Coil Drives


  • Fast Scanning and Positioning
  • Scanning Frequency 10s of Hz
  • Travel Ranges of 20 mm and 6 mm
  • Velocity up to 240 mm/s
  • Linear Encoder Allows 0.2 Micron Repeatability
  • Available PCI-Card Controller with On-Board Amplifiers
Product Description | Specs / Drawings | Ordering Info | PDF


Actuators & Micrometers

Product Image - High-Resolution DC-Mike Actuators

M-227 High-Resolution DC-Mike Actuators


  • 10, 25 & 50 mm Travel Ranges
  • 0.05 Micron Minimum Incremental Motion
  • Non-Rotating Tip
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Sub-Nanometer Resolution with Optional PZT Drive
  • >5,000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - High-Resolution Closed-Loop DC-Mike & Stepper Actuators

M-228 - M-229 Stepper-Mike Linear Actuators with Limit Switches


  • Cost-Efficient Design
  • To 10 mm or to 25 mm Travel Range
  • 46 nm Resolution (with C-663 Controller)
  • 50 N Load Capacity
  • Non-Rotating Tip
  • Max. Velocity 1.5 mm/s
  • Non-Contact Limit and Reference Switches Compact Design
Back to Top  M-228 Product Description | M-228 Specs / Drawings | M-228 Ordering Info | M-228 PDF
Parametric Search      M-229 Product Description | M-229 Specs / Drawings | M-229 Ordering Info | M-229 PDF

Product Image - High-Resolution Closed-Loop DC-Mike & Stepper Actuators

M-230 High-Resolution Closed-Loop DC-Mike & Stepper Actuators


  • 10 & 25 mm Travel Range
  • 0.05 Micron Minimum Incremental Motion
  • Non-Rotating Tip
  • Velocity to 2 mm/sec.
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Front Mount or Clamp Mount
  • >5,000 Hours MTB
Back to Top
Parametric Search      Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - High-Resolution Closed-Loop DC-Mike Actuators

M-231 High-Resolution Closed-Loop DC-Mike Actuators


  • 17 mm Travel Range
  • 0.1 Micron Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Compact, High-Resolution, Closed-Loop DC-Mike Actuator

M-232 Compact, High-Resolution, Closed-Loop DC-Mike Actuator


  • 17 mm Travel Range
  • 0.1 Micron Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit and Origin Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators

M-235 Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators


  • 20 mm or 50 mm Travel Range
  • 0.1 Micron Minimum Incremental Motion
  • High-Speed Direct Drive Option
  • 120 N Push/Pull Load
  • 100 N Lateral Load Limit
  • Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit & Origin Switches
  • >20,000 Hours MTBF
  • Vacuum Versions
Back to Top
Parametric Search      Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Differential Micrometer Drives

M-238 Heavy-Duty DC-Mike Actuators


  • High Load Capacity to 400 N
  • Optional 0.1 Micron Direct Metrology Linear Encoder for Exceptional Precision
  • Travel Range to 50 mm
  • Minimum Incremental Motion to 0.3 Micron
  • Max. Velocity: 30 mm/s
  • Preloaded Frictionless Ball Screw
  • MTBF > 20.000 h
  • Vacuum-Compatible Versions Available for 10-6 hPa
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - PILine® RodDrive Integrated Piezo Linear Motor Drive

M-674 PILine® RodDrive Integrated Piezo Linear Motor Drive


  • Drive-Component for Integration into Micropositioning Systems
  • Flexible Choice of Travel Ranges to Several 100 mm
  • Flexible Choice of Push/Pull Forces to Several 10 N
  • Minimum Incremental Motion to 0.05 Micron
  • Velocity to 400 mm/s
  • Self-Locking
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - PiezoMike: Piezoelectric Micrometer Drive

P-853 - P-854 PiezoMike: Piezoelectric Micrometer Drive


  • Alternative for Standard Micrometer Drives
  • Manual Travel to 18 mm
  • Piezoelectric High-Resolution Travel to 25 Micron
  • Sub-Nanometer Resolution
  • Dynamic Operation to 10 Hz

Product Description | Specs / Drawings | Ordering Info | PDF

Prodcut Image - NEXLINE Miniature High-Load Piezo Nanopositioning Drive

N-111 NEXLINE® Miniature High-Load Piezo Nanopositioning Drive


  • Travel Range 10 mm
  • Resolutionto 0.025 nm
  • Open-Loop, 5 nm Closed-Loop
  • Up To 50 N Force Generation and 70 N Holding Force
  • Self Locking at Rest, No Heat Generation
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible


Back to Top
Parametric Search      Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - EXLINE High-Load Piezo Nanopositioning Drive

N-216 NEXLINE® High-Load Piezo Nanopositioning Drive


  • Winner of the SEMI Technology Innovation Showcase Award
  • 20 mm Travel Range, <0.1 Nanometer Resolution (Open-Loop)
  • Integrated High-Resolution Incremental Encoder (Closed-Loop)
  • Active Force Generation to 400 N
  • >800 N Holding Force, Self-Locking
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - High-Resolution Stepper-Mike Actuators

M-168 High-Resolution Stepper-Mike Actuators


  • 10, 25 & 50 mm Travel Ranges
  • Resolution <0.1 Micron
  • 2- and 5-Phase Stepper Motor
  • Manual Positioning Knob
  • Sub-Nanometer Resolution with Optional PZT Actuator
  • >5,000 Hours MTBF
Back to Top
Parametric Search     Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Micrometer Drives with Rotating Tips

M-619 – M-626 Micrometer Drives with Rotating Tips


  • 1 Micron Sensitivity
  • 10 Micron Graduations
  • Travel up to 25 mm
  • Model M-626.05 with Lockable Spindle

Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Precision Micrometer Drives with Non-Rotating Tips

M-631 Precision Micrometer Drives with Non-Rotating Tips


  • 10, 25 and 50 mm Travel
  • Pitch 0.5 mm/Rev.
  • Low-Friction Construction
  • 1 Micron Manual Sensitivity
  • Sub-Nanometer Resolution with Optional PZT Actuator
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Differential Micrometer Drives

M-653 Differential Micrometer Drives


  • 0.1 Micron Sensitivity
  • 1 Micron Graduations
  • Travel to 20 mm

Product Description | Specs / Drawings | Ordering Info | PDF

Vertical Translation Stages

Product Image - Vertical Micropositioning Stage

M-501 Vertical Micropositioning Stage


  • Travel Range 12.5 mm (1/2")
  • Ultra-High-Resolution Encoder
  • ActiveDrive™ Motor
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact Origin and Limit Switches
  • >20,000 Hours MTBF

Back to Top
Parametric Search     Product Description | Specs / Drawings | Ordering Info | PDF

Product Image -  High-Load Vertical Micropositioning Stage

M-451 High-Load Vertical Micropositioning Stage


  • 3 Nanometer Design Resolution
  • 12 kg Load Capacity, High Stiffness
  • <100 Nanometer Minimum Incremental Motion
  • 12.5 mm (1/2") Travel Range
  • ActiveDrive™ Motor
  • Compatible with Leading Industrial Motion Controllers
  • Non-Contact Origin and Limit Switches
  • Mounting Platform for P-500 and PIMars™ Piezo- Nanopositioning Systems
  • Self Locking

Product Description | Specs / Drawings | Ordering Info | PDF

Product Image -  M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage

M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments


Product Description | Specs / Drawings | Ordering Info | PDF


Rotation Stages & Tilt Stages

Product Image - Tip/Tilt Stages

M-044 Tip/Tilt Stages


  • One- & Two-Axis Tilt Stages
  • Zero Backlash
  • Sub-microradian Resolution
  • Manual and DC-Motor Drives
  • Compatible with Leading Industrial Motion Controllers
  • Optional Piezo Drives for Tracking and Scanning
Back to Top
Parametric Search     Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - M-660 PILine® Rotation Stage Fast Positioning, Ultra-Low Profile

M-660 PILine® Rotation Stage Fast Positioning, Ultra-Low Profile


  • Unlimited Travel Range
  • Max. Velocity 720 °/s
  • Low Profile: Only 14 mm in Height
  • Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
  • Direct Metrology Linear Encoder, 34 µrad Resolution PILine® Direct Drive: Non-Magnetic and Vacuum- Compatible Working Principle
  • Compact Combinations with Linear Stages
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Micro Rotation Stages with Worm Gear Drive

M-116 Micro Rotation Stages with Worm Gear Drive


  • Ultra-Compact Design
  • Continuous Rotation
  • 2.5 microradian Design Resolution
  • Clear Aperture
  • Velocity up to 20 degrees/second
  • Preloaded Anti-Backlash Worm Drive
  • Fits Directly on M-110 Micro Translation Stages
  • Compatible with Leading Industrial Motion Controllers
  • Non-Contact Reference Switch
  • Up to 10 microradian Repeatability
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Rotation Stages with Worm Gear Drive

M-038 Rotation Stages with Worm Gear Drive (100 mm diameter)


  • Ultra-High Resolution
  • Continuous Rotation
  • Preloaded Worm Drive for Zero Backlash
  • ActiveDrive™ DC-Motor, Stepper-Motor and Manual Versions
  • Compatible with Leading Industrial Motion Controllers
  • Clear Aperture

Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Compact Precision Tangent-Arm Rotation Stages with Optional DC-Motor and Piezo Drives

M-035 Compact Precision Tangent-Arm Rotation Stages with Optional DC-Motor and Piezo Drives


  • Sub-Microradian Resolution
  • 360o Coarse Range, up to 19o Fine Range with <1 microradian Resolution
  • Precision Micrometer or DC Motor Drives
  • Piezo Option for High-Resolution Scanning and Tracking
  • Ø 20 mm Clear Aperture

Back to Top
Parametric Search     Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Precision Tangent-Arm Rotation Stages with Optional DC-Motor and Piezo Drives

M-036 Precision Tangent-Arm Rotation Stages with Optional DC-Motor and Piezo Drives


  • Sub-Microradian Resolution
  • 360o Coarse Range, up to 21o Fine Range
  • Precision Micrometer or DC Motor Drives
  • Piezo Option for High-Resolution Scanning and Tracking
  • Ø 30 mm Clear Aperture
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Series Rotation Stages with Worm Gear Drive

M-060 Series of Rotation Stages with Worm Gear Drive


  • Continuous Rotation
  • Ultra - High Resolution
  • Velocity up to 90 deg/sec.
  • Preloaded Worm Drive for Zero Backlash
  • ActiveDrives™ DC-Motor, Stepper-Motor and Manual Versions
  • Compatible with Leading Industrial Motion Controllers
  • Direction - Sensing Origin Switch
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Rotation Stages with Worm Gear Drive

M-037 Rotation Stages with Worm Gear Drive (60 mm diameter)


  • Ultra-High Resolution
  • Compact Design
  • Continuous Rotation Range
  • Preloaded Worm Drive for Zero Backlash
  • ActiveDrive™ DC-Motor, Stepper Motor and Manual Versions
  • Compatible with Leading Industrial Motion Controllers
  • 20 mm ø Clear Aperture

Back to Top
Parametric Search     Product Description | Specs / Drawings | Ordering Info | PDF

Hexapod Six-Axis Micropositioning Systems

Product Image - M-824 Vacuum Hexapod M-810 Miniature Hexapod 6 DoF & High Precision in a Small Package
  • Most-Compact Hexapod in the PI Portfolio
  • Travel Ranges 40 x 40 x 13 mm, Rotation to 60 Degrees
  • Load Capacity to 5 kg
  • Resolution of a Single Strut 40 nm
  • Min. Incremental Motion to 200 nmRepeatability up to ±0.5 µm
  • Velocity to 10 mm/s
Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet


Product Image - M-824 Vacuum Hexapod M-824 Compact Six-Axis Parallel Kinematics Microrobot
  • Six Degrees of Freedom
  • Vacuum Compatible Versions
  • Load Capacity 10 kg
  • Travel Ranges to 45 mm (linear), 25° (rotation)
  • 7 Nanometer Resolution
  • 300 Nanometer Min. Incremental Motion
  • Repeatability ±0.5 Micron
  • Very Compact Design
  • Self Locking to 10 kg
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - M-850 Hexapod M-850 Hexapod Six-Axis-Parallel Kinematics Microrobot
  • Six Degrees of Freedom
  • Works in Any Orientation
  • No Moving Cables for Improved Reliability and Precision
  • 200 kg Load Capacity (Vertical)
  • Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
  • Repeatability to ±1 Micron
  • Actuator Resolution to 0.005 Micron
  • Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
  • Vacuum-Compatible Versions
  • Linear and Rotary Multi-Axis Scans
  • Virtualized Center of Rotation (Pivot Point)
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF
Back to Top
Parametric Search     Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - HexaLight 6-Axis-Parallel Kinematics Microrobot M-840 HexaLight™ Six-Axis Parallel Kinematics Microrobot
  • Six Degrees of Freedom
  • Rapid Response
  • No Moving Cables for Improved Reliability and Precision
  • 10 kg Load Capacity
  • Repeatability to ±2 Micron
  • Actuator Resolution to 0.016 Micron
  • Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
  • Vacuum-Compatible Versions
  • Virtualized Pivot Point
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF
Back to Top
Parametric Search     Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - HexAlign 6-Axis Precision Alignment System / Manipulator (Hexapod) F-206 HexAlign™ Six-Axis Precision Alignment System / Manipulator (Hexapod)
  • Parallel Kinematics with 6 Degrees of Freedom
  • 0.033 Micron Actuator Resolution
  • Repeatability 0.3 Micron in Space
  • No Moving Cables for Improved Reliability, Reduced Friction
  • Better Dynamics, More Compact than Serial Kinematics Systems
  • For Scanning and Alignment
  • Cartesian Coordinate Control with Virtualized Pivot Point.
  • Powerful Digital Controller with Open Source LabView™ Drivers, DLL Libraries...
  • Integrated Fiber Alignment Routines
Product Description | Specs / Drawings | Ordering Info | PDF

6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology

P-587 Six-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology


  • For Scanning and Positioning in all Six Degrees of Freedom
  • 800 x 800 x 200 Micron Linear Range
  • Up to 10 mad Rotational Range
  • Precision Trajectory Control
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • ID-Chip for Auto Calibration Function
  • PICMA® High - Performance Multilayer Piezo Drives
Back to Top
Parametric Search     Product Description | Specs / Drawings | Ordering Info | PDF

Talk to Your PI Application Engineer Today
for Your Custom or Standard Solution!


Find the PI Location Closest to You

Get the new hardbound, 530 page PI Catalog


 
Hexapods    Piezo    Nanopositioning Catalog   Piezo Nano-Positioning and Parallel Kinematics    Ultrasonic Piezo Motors
OEM Experience; See the Variety of PI Custom Stages
Reasons for Choosing PI
Technologies That Set PI Apart
Download the Micropositioning Solutions / Hexapod Catalog (PDF)
Piezo Linear Motors: PiezoWalk® vs. Ultrasonics
PDF Catalog: Piezo Motor Linear Actuators and Stages

For Nanopositioning Systems (Ultra-Precision Piezo Stages) Click Here
  • Sub-Nanometer Precision
  • Up to 6 Degrees of Freedom
  • Very Fast Response
Jump to the Nanopositioning Selection Guide!

For Piezoelectric Linear Actuators, Shear Actuators, Tubular Actuators click here
  • Sub-Nanometer Relsolution
  • Very High Forces (up to 8 Tons)
  • Sub-Millisec Response
  • Large Variety of Standard and Custom Models
  • PICMA Multilayer Type Ceramics with Ceramic Insulation
Jump to the Piezo Selection Guide!


Motorized Micropositioners


M-230 ... M-238 Precision Linear Actuators (Models M-230, M-231, M-232, .....)
  • Ultra Compact
  • 50 nm minimum incremental motion (7 nm design resolution)
  • Non rotating tip, ball screws, high load, high speed versions

PDF Files      HTML Catalog Files
              M-227 with Optional Piezo Tip
              M-230 (10, 25 mm, non rotating tip)
              M-232 Compact Mike
              M-235 HD Ball Screw
              M-238 Ultra-High Load Precision Ball Screw Drive, Linear Encoder

Jump to the Linear Actuators and Micrometers Selection Guide!


Micro-Translation Stages (Models M-110 / M-111 / M-112 / M-122)
  • Ultra Compact
  • 50 nm minimum incremental motion (7 nm design resolution)
  • X, XY and XYZ Combinations

PDF File     HTML Catalog Files

            M-110/111/M-112 Leadscrew
            M-110/111/M-112 Ballscrew
            M-122 Ballscrew, Linear Encoder, Ultra Precision

Jump to the Micro-Stage Series Selection Guide!

Linear Piezo-Motor-Driven Micro Stages (Models M-661, 662, 663, 682)
  • Smallest Linear Motor-Driven Translation Stages on the Market
  • Velocity to 800 mm/s
  • Acceleration to 20 g
  • Resolution to 0.1 µm

PDF File      HTML Catalog Files
             M-661/M-662 Open-Loop
             M-663 Closed-Loop
             M-682 Closed-Loop
             M-686 Closed-Loop XY Stage with Large Aperture
             P-652 Sub-Miniature Motor
             OEM Piezo Motors

Jump to the Piezo Linear Motor Stages Selection Guide!

Low-Cost, Long Travel Stages in 48 Variations
  • Stress-Relieved Aluminum Base for Highest Stability
  • Zero-Backlash Recirculating Ball Bearings
  • Lead-Screw-Driven

PDF File      HTML Catalog Files
            M-403 High Resolution Translation Stage
            M-404 High Resolution Translation Stage
            M-413 High Resolution Translation Stage
            M-414 High Resolution Translation Stage

M-605 Series Translation Stages with Linear Encoders and ActiveDrive TM
  • 50 and 25 mm Versions,
  • Integrated Linear Encoder (Direct Output Metrology)
  • Very Compact, Low Profile, Recirculating Bearings & Ball Screws
  • Integrated Servo-Amplifier

PDF File      HTML Catalog Files
             M-605 Precision Translation Stage       

Hybrid Ultra-Precision DC-Servo / PZT Translation Stages with 2 Nanometer Resolution
  • Low Profile, Recirculating Bearings & Ball Screws
  • Integrated Motion Controller / Driver, Daisy-Chain up to 27
  • 100 nm minimum incremental motion

PDF File      HTML Catalog Files
             Hybrid 100 Millimeter X-STage
             Hybrid 7 Millimeter Z-STage

Jump to the Translation Stages Selection Guide!

M-500 Translation Stages with Linear Encoders and ActiveDriveTM
  • 100 to 300 mm (12 inch) Versions
  • Low Profile, Recirculating Bearings & Ball Screws
  • Integrated Servo-Amplifier
  • Optional Linear Encoders (Direct Output Metrology)
  • Elevator Stage for Compact XYZ Combinations

PDF File      HTML Catalog Files
             M-501 Elevator Stage
             M-511 Translation Stage


Rotation Stages with ActiveDriveTM
  • Low Profile, High Precision
  • Integrated Servo-Amplifier
  • Interated Hall-Effect Home Switch

PDF File      HTML Catalog Files
             M-036 Precision Tangent-Arm Rotation Stages
             M-037 Rotation Stages
             M-060, M-061, M-062 Rotation Stages
             M-116 Micro Rotation Stages with Worm Gear Drive


M-041 · M-044 Tip/Tilt Stages
  • One- & Two-Axis Tilt Stages
  • Zero Backlash
  • Sub-µrad Resolution
  • Manual and DC-Motor Drives

             M-041 · M-044 Tip/Tilt Stages

Scanning Stages with Voice-Coil Drive
  • Fast Scanning & Positioning
  • X and XY Versions
  • Velocity up to 50 mm/sec
  • Travel Range: 5 mm

PDF File      HTML Catalog Files
            V-106 Voice-Coil Scanning System

Ultra-Low Inertia Hexapod Micropositioning Systems (6 Degree of Freedom Parallel-Kinematics)

PI is the leading manufacturer of Hexapods for Optics Alignment, Micro-Machining, Handling, Photonics Alignment Engines, Medical Robots and other ultra-precise applications, with more than 10 years of experience, a great variety of standard and custom designs and hundreds of units in the field.

Advantages of Hexapod Parallel Kinematics over "Stacked" multi-axis designs:

  • Smaller Package Size
  • Higher Stiffness
  • Reduced Position Error Accumulation
  • Better Dynamic Behavior
  • Reduced Runout Errors
  • More Precise Multi-axis Motion
  • No Moving Cables!
More about Hexapods...

F-130 Hybrid Photonics Alignment System


M-313.80 used in Photonics Alignment System
Hybrid Nanopositioning Systems

These positioning systems combine the advantages of ultra-low inertia, high-speed PZT Nanopositioning systems and the long travel range of classical micropositioning stages. For high-speed scanning only a very small mass needs to be moved resulting in much better response.

Advantages are:

  • Low Inertia
  • Fast Response
  • Sub-Nanometer Resolution
  • Low Cost
  • Upgradeable Design (Motors, Piezos Drives)

PDF File       HTML Catalog Files
                     F-130/F-131 Hybrid Aligner
               F-130 Technote Cost-Effective OEM Alignment Workstation
              M-105 Manual/Piezo Aligner

Talk to Your PI Application Engineer Today
for Your Custom or Standard Solution!


Find the PI Location Closest to You

Get the new hardbound, 500 page PI Catalog




Ultrasonic Piezo Motors PI USA PIFOC Actuators Nanopositioning Hexapods Nanopositioning Catalog Capacitive Sensors Micropositioning Nano Transducers Transducers Piezo-Nano Technology Piezo_Nano_Imaging Nanoautomation Piezo Ceramics Translation Stages Nano-Precision Actuator Piezo-Nano-Imaging Physik Instrumente (German Site) Physik Instrumente (International Site) Nanopositioning Piezo Stage Nanotechnology Piezo Transducer Parallel-Kinematic Parallel-Kinematics Parallelkinematic Parallelkinematics Piezo-Motor Physik Instrumente.net Tripod Precision Stage Precision Motion Control Linear Stage Piezo Nanopositioning Piezo Solutions for Nanotechnology Applications Precision Linear Stages