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| Micropositioners, Actuators, Piezomotors, Translation & Rotation Stages, Hexapods, Nanopositioning and more... |
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| PI is a leading manufacturer of ultra-precision motion control solutions for OEM and research and offers a large range of Micropositioning and Nanopositioning
devices and systems. Our expertise spans from manual actuators to the unique Hybrid
DC/PZT Translation stages to Hexapod 6D parallel kinematics micropositioning systems.
All linear and rotary positioners can be arranged to multiaxis combinations and many can be fitted with
optional piezo drives with <1 nm resolution.
Our new line of compact Piezo Linear Motors and Translation Stages are the smallest, fastest and most powerful on the market. |
Hexapod Six-Axis Micropositioning |
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Actuators & Micrometers |
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Voice Coil Scanning Stages |
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Vertical Translation Stages |
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Rotation Stages & Tilt Stages |

6º of Freedom
Vacuum Compatible
Capacity: To 200 kg
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Travel: 10 mm-50 mm
Forces to 30 N
Resolution to 50 nm
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Scanning Freq:10s of Hz
Velocity to 240 mm/s
Travel: 20 mm / 6 mm
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ActiveDrive™ Motor
Fast Response
Travel: to 12.5 mm (1/2")
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Forces to 100 kN
Sub-nm Resolution
Fast Response
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Linear Translation Stages |
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Motorized Micro-Series |
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Piezo Linear Motors/Stages |
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Motion Controllers |
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Piezo Nanopositioning Stages |

ActiveDrive™ Motor
Lead- or Ball- Screw Drive
Travel: 5 to 306 mm
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Miniature Stages
Lead- or Ball- Screw Drive
Travel: to 25 mm or 360°
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Fast Scanning
Ultrasonic Motor Drives
Compact
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Servo/Stepper/ Piezomotor Options
1-18 Channel Options
PC-Card, OEM / Rack-mount
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1-6 Axis
Sub-nm precision
Low-Profile Options
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| Linear Translation Stages |
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- Travel Range 25 mm
- 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
- Min. Incremental Motion to 0.2 µm
- Max. Velocity 20 mm/s
- Cross-Roll Bearings
- Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Travel Ranges 5, 15 and 25 mm
- MTBF 5000 h
- Very Cost Effective
- Min. Incremental Motion to 50 nm
- Max. Velocity 2 mm/s
- Closed-Loop DC Motors and Stepper Motors
- Non-Contact Limit and Reference Switches
- Optional Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
- Vacuum-Compatible Versions Available to 10-6 hPa
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
- 20 mm Travel Range
- Velocity up to 500 mm/s
- Accelerations up to 20 g
- Resolution to 0.1 Micron
- Integrated Direct-Metrology Linear Encoder
- AutoLock Feature
- XY Combinations Available
- 20,000 h MTBF
- Vacuum Versions Available
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Travel Range 25 mm
- Max. Velocity 400 mm/s
- Ultra-Low Profile, 15 mm
- Direct Metrology Linear Encoder with 0.1 µm Resolution
- High Guiding Accuracy with Crossed Roller Bearings
- Compact XY Combinations
- Piezo Linear Motor with 6 N Drive Force
- Self Locking at Rest
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Smallest Translation Stage with High-Speed
Linear Motor Drive
- 20 mm Travel Range
- Velocity to 500 mm/s
- Acceleration to 20 g
- Resolution to 50 Nanometer
- Self-Locking
- XY-Combinations Available
- 20000 h MTBF
- Vacuum Versions to 10-7
hPa
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Max. Velocity 350 mm/s
- Low Profile: Only 21 mm Height
- Compact XY Combination Possible
- Up to 6 N Force Generation
- Direct Metrology Linear Encoder, 0.1 µm Resolution
- Travel Range 50 mm
- Excellent Guiding Accuracy Through Crossed Roller Bearings
- PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
- Self-Locking at Rest
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
- 25 x 25 mm Travel Ranges
- Integrated Linear Encoders with 0.1 µm Resolution
- Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
- Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
- Self-Locking at Rest
- Compatible with PI Piezo Nanopositioning / Scanning Stages
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Extremely Compact
- All-Stainless-Steel Construction
- X, XY and XYZ Versions
- Optional PiezoMike for Nanometer Resolution
- 4 mm Clear Aperture
- Linear Ball Bearings
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Travel Range to 15 mm
- Compact Side Drive
- Straightness/Flatness ≤ 0.2 Micron
- PZT Drive for Scanning and Tracking
Applications
- 0.1 Micron Resolution with Closed-Loop DC Motor
- 5 Nanometer Resolution with Closed-Loop PZT
Drive
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- Travel Range 25 mm
- Compact Side Drive
- Straightness/Flatness ≤0.3 Micron
- PZT Drive for Scanning and Tracking
Applications
- 0.1 Micron Resolution with Closed-Loop DC Motor
- 5 Nanometer Resolution with Closed-Loop PZT Drive
- 30 mm Ř Clear Aperture
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Product Description | Specs / Drawings | Ordering Info | PDF
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- To 25 mm Travel Range
- Manual, DC-Servo and Stepper-Motor Drives
- ActiveDrive Option
- Compatible with Leading Industrial Motion Controllers
- Crossed Roller Bearings
- <0.1 Micron Resolution
- XY and XYZ Combinations
- Direction-Sensing Origin Switch
- Non-Contact Limit Switches
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Cost-Effective Design
- Modular System with 4 Series: M-403, M-404, M-413, M-414
- Preloaded Leadscrews or Recirculating Ball Screws
- Travel Ranges from 25 to 300 mm
- Stress-Relieved Aluminum Base 80 and 120 mm Width
- Minimum Incremental Motion to 0.1 Micron
- Resolution to 0.017 Micron
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- Travel Ranges to 150 mm
- Stress-Relieved Aluminum Stage Base for
Highest Stability
- Crossed Roller Bearings
- Manual, DC-Servo and Stepper-Motor Drives,
ActiveDrive™ Option
- Compatible with Leading Industrial Motion
Controllers
- Manual Knob for Convenient Position
Adjustment
- Non-Contact Direction-Sensing Origin Switch
- Non-Contact Limit Switches
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Integrated Linear-Scale Encoders for Highest
Accuracy
- Travel Ranges 25 mm (1") and 50 mm (2")
- Velocity up to 50 mm/sec.
- Active Drive™ Motors
- Compatible with Leading Industrial Motion
Controllers
- Stress-Relieved Aluminum Stage Base for
Highest Stability
- Zero-Backlash Recirculating Ballscrews
- Non-Contact, Direction-Sensing Origin Switch
- Non-Contact Limit Switches
- Load Capacity 20 kg
- >20,000 Hours MTBF
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Travel Ranges to 150 mm (6 inches)
- Velocity up to 50 mm/sec.
- ActiveDrive™ Motors
- Compatible with Leading Industrial Motion
Controllers
- Stress-Relieved Aluminum Stage Base for
Highest Stability
- Zero-Backlash Recirculating Ballscrews
- Non-Contact Direction-Sensing Origin Switch
- Non-Contact Limit Switches
- Load Capacity 100 kg
- > 20,000 Hours MTBF
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- Travel Ranges to 306 mm (12")
- Velocity up to 125 mm/sec.
- ActiveDrive™ Motors
- Compatible with Leading Industrial Motion
Controllers
- Linear-Scale Encoders for Highest Accuracy
- Stress-Relieved Aluminum Stage Base for
Highest Stability
- Zero-Backlash Recirculating Ballscrews
- Non-Contacting Origin and Limit Switches
- PIIntelliStage™ Version with Integrated
Controller
- Load Capacity 100 kg
- >20000 Hours MTBF
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
- 4 Nanometer Linear Encoder Resolution
- 100 mm Travel
- Velocities to 125 mm/sec
- Active Compensation of Stick/Slip During Startup and Settling
- Active Backlash Compensation
- Excellent Velocity Control
- Millisecond Settling to Nanometer Accuracy
- Reliable Execution of Minimal Increments
- High Drive and Holding Forces with Minimal Power
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Parametric Search
Product Description | Specs / Drawings | Ordering Info | PDF
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| Voice Coil Scanning Stages |
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- Fast Scanning and Positioning
- Scanning Frequency 10s of Hz
- Travel Ranges of 20 mm and 6 mm
- Velocity up to 240 mm/s
- Linear Encoder Allows 0.2 Micron Repeatability
- Available PCI-Card Controller with On-Board
Amplifiers
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Product Description | Specs / Drawings | Ordering Info | PDF
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| Actuators & Micrometers |
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- 10, 25 & 50 mm Travel Ranges
- 0.05 Micron Minimum Incremental Motion
- Non-Rotating Tip
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion
Controllers
- Sub-Nanometer Resolution with Optional PZT Drive
- >5,000 Hours
MTBF
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Product Description | Specs / Drawings | Ordering Info | PDF |
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- Cost-Efficient Design
- To 10 mm or to 25 mm Travel Range
- 46 nm Resolution (with C-663 Controller)
- 50 N Load Capacity
- Non-Rotating Tip
- Max. Velocity 1.5 mm/s
- Non-Contact Limit and Reference Switches
Compact Design
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M-228 Product Description | M-228 Specs / Drawings | M-228 Ordering Info | M-228 PDF |
Parametric Search
M-229 Product Description | M-229 Specs / Drawings | M-229 Ordering Info | M-229 PDF
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- 10 & 25 mm Travel Range
- 0.05 Micron Minimum Incremental Motion
- Non-Rotating Tip
- Velocity to 2 mm/sec.
- Closed-Loop DC Motors and Stepper Motors
- Compatible with Leading Industrial Motion
Controllers
- Integrated Hall-Effect Origin and Limit
Switches
- Front Mount or Clamp Mount
- >5,000 Hours MTB
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Parametric Search
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- 17 mm Travel Range
- 0.1 Micron Minimum Incremental Motion
- Velocity up to 2.5 mm/sec.
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion
Controllers
- Integrated Hall-Effect Origin and Limit
Switches
- Fits M-105 & F-110 Fiber Aligners
- >5,000 Hours
MTBF
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Product Description | Specs / Drawings | Ordering Info | PDF
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- 17 mm Travel Range
- 0.1 Micron Minimum Incremental Motion
- Velocity up to 2.5 mm/sec.
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion
Controllers
- Integrated Hall-Effect Limit and Origin
Switches
- Fits M-105 & F-110 Fiber Aligners
- >5,000 Hours
MTBF
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Product Description | Specs / Drawings | Ordering Info | PDF
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- 20 mm or 50 mm Travel Range
- 0.1 Micron Minimum Incremental Motion
- High-Speed Direct Drive Option
- 120 N Push/Pull Load
- 100 N Lateral Load Limit
- Preloaded Ultra-Low-Friction Ball Screw with
Non-Rotating Tip
- Closed-Loop DC Motors and Stepper Motors
- Compatible with Leading Industrial Motion
Controllers
- Integrated Hall-Effect Limit & Origin
Switches
- >20,000 Hours MTBF
- Vacuum Versions
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- High Load Capacity to 400 N
- Optional 0.1 Micron Direct Metrology Linear Encoder for Exceptional Precision
- Travel Range to 50 mm
- Minimum Incremental Motion to 0.3 Micron
- Max. Velocity: 30 mm/s
- Preloaded Frictionless Ball Screw
- MTBF > 20.000 h
- Vacuum-Compatible Versions Available for 10-6 hPa
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Drive-Component for Integration into Micropositioning Systems
- Flexible Choice of Travel Ranges to Several 100 mm
- Flexible Choice of Push/Pull Forces to Several 10 N
- Minimum Incremental Motion to 0.05 Micron
- Velocity to 400 mm/s
- Self-Locking
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Alternative for Standard Micrometer Drives
- Manual Travel to 18 mm
- Piezoelectric High-Resolution Travel to 25
Micron
- Sub-Nanometer Resolution
- Dynamic Operation to 10 Hz
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Travel Range 10 mm
- Resolutionto 0.025 nm
- Open-Loop,
5 nm Closed-Loop
- Up To 50 N Force Generation and 70 N Holding Force
- Self Locking at Rest, No Heat Generation
- Non-Magnetic and Vacuum-Compatible Working Principle
- Cleanroom Compatible
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- Winner of the SEMI Technology Innovation
Showcase Award
- 20 mm Travel Range, <0.1 Nanometer Resolution
(Open-Loop)
- Integrated High-Resolution Incremental
Encoder (Closed-Loop)
- Active Force Generation to 400 N
- >800 N Holding Force,
Self-Locking
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Product Description | Specs / Drawings | Ordering Info | PDF
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- 10, 25 & 50 mm Travel Ranges
- Resolution <0.1 Micron
- 2- and 5-Phase Stepper Motor
- Manual Positioning Knob
- Sub-Nanometer Resolution with Optional PZT Actuator
- >5,000 Hours MTBF
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- 1 Micron Sensitivity
- 10 Micron Graduations
- Travel up to 25 mm
- Model M-626.05 with Lockable
Spindle
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Product Description | Specs / Drawings | Ordering Info | PDF
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- 10, 25 and 50 mm Travel
- Pitch 0.5 mm/Rev.
- Low-Friction Construction
- 1 Micron Manual Sensitivity
- Sub-Nanometer Resolution with Optional PZT
Actuator
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Product Description | Specs / Drawings | Ordering Info | PDF
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- 0.1 Micron Sensitivity
- 1 Micron Graduations
- Travel to 20 mm
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Product Description | Specs / Drawings | Ordering Info | PDF
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| Vertical Translation Stages |
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- Travel Range 12.5 mm (1/2")
- Ultra-High-Resolution Encoder
- ActiveDrive Motor
- Compatible with Leading Industrial Motion
Controllers
- Stress-Relieved Aluminum Stage Base for
Highest Stability
- Zero-Backlash Recirculating Ballscrews
- Non-Contact Origin and Limit Switches
- >20,000 Hours
MTBF
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Parametric Search Product Description | Specs / Drawings | Ordering Info | PDF
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- 3 Nanometer Design Resolution
- 12 kg Load Capacity, High Stiffness
- <100 Nanometer Minimum Incremental Motion
- 12.5 mm (1/2") Travel Range
- ActiveDrive Motor
- Compatible with Leading Industrial Motion
Controllers
- Non-Contact Origin and Limit Switches
- Mounting Platform for P-500 and PIMars
Piezo- Nanopositioning Systems
- Self Locking
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
- 2 Nanometer Linear Encoder Resolution
- High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
- Active Compensation of Stick/Slip During Startup and Settling
- Active Backlash Compensation
- Excellent Velocity Control
- Millisecond Settling to Nanometer Accuracy
- Reliable Execution of Minimal Increments
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Product Description | Specs / Drawings | Ordering Info | PDF
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| Rotation Stages & Tilt Stages |
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- One- & Two-Axis Tilt Stages
- Zero Backlash
- Sub-microradian Resolution
- Manual and DC-Motor Drives
- Compatible with Leading Industrial Motion
Controllers
- Optional Piezo Drives for Tracking and
Scanning
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- Unlimited Travel Range
- Max. Velocity 720 °/s
- Low Profile: Only 14 mm in Height
- Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
- Direct Metrology Linear Encoder, 34 µrad Resolution PILine® Direct Drive: Non-Magnetic and Vacuum- Compatible Working Principle
- Compact Combinations with Linear Stages
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Ultra-Compact Design
- Continuous Rotation
- 2.5 microradian Design Resolution
- Clear Aperture
- Velocity up to 20 degrees/second
- Preloaded Anti-Backlash Worm Drive
- Fits Directly on M-110 Micro Translation
Stages
- Compatible with Leading Industrial Motion
Controllers
- Non-Contact Reference Switch
- Up to 10 microradian Repeatability
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Ultra-High Resolution
- Continuous Rotation
- Preloaded Worm Drive for Zero Backlash
- ActiveDrive™ DC-Motor, Stepper-Motor and Manual Versions
- Compatible with Leading Industrial Motion Controllers
- Clear Aperture
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Sub-Microradian Resolution
- 360o Coarse Range, up to 19o Fine Range with
<1 microradian Resolution
- Precision Micrometer or DC Motor Drives
- Piezo Option for High-Resolution Scanning
and Tracking
- Ø 20 mm Clear
Aperture
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Parametric Search Product Description | Specs / Drawings | Ordering Info | PDF
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- Sub-Microradian Resolution
- 360o Coarse Range, up to 21o Fine Range
- Precision Micrometer or DC Motor Drives
- Piezo Option for High-Resolution Scanning
and Tracking
- Ø 30 mm Clear Aperture
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Continuous Rotation
- Ultra - High Resolution
- Velocity up to 90 deg/sec.
- Preloaded Worm Drive for Zero Backlash
- ActiveDrives DC-Motor, Stepper-Motor and
Manual Versions
- Compatible with Leading Industrial Motion
Controllers
- Direction - Sensing Origin
Switch
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Product Description | Specs / Drawings | Ordering Info | PDF
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- Ultra-High Resolution
- Compact Design
- Continuous Rotation Range
- Preloaded Worm Drive for Zero Backlash
- ActiveDrive™ DC-Motor, Stepper Motor and Manual Versions
- Compatible with Leading Industrial Motion Controllers
- 20 mm ø Clear Aperture
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Talk to Your PI Application Engineer Today
for Your Custom or Standard Solution!
Find the PI Location Closest to You
Get the new hardbound, 530
page PI Catalog
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For Piezoelectric Linear Actuators, Shear Actuators, Tubular Actuators click here
- Sub-Nanometer Relsolution
- Very High Forces (up to 8 Tons)
- Sub-Millisec Response
- Large Variety of Standard and Custom Models
- PICMA Multilayer Type Ceramics with Ceramic Insulation
Jump to the Piezo Selection Guide!
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Motorized Micropositioners
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M-230 ... M-238 Precision Linear Actuators (Models M-230, M-231, M-232, .....)
- Ultra Compact
- 50 nm minimum incremental motion (7 nm design resolution)
- Non rotating tip, ball screws, high load, high speed versions
PDF Files HTML Catalog Files
M-227 with Optional Piezo Tip
M-230 (10, 25 mm, non rotating tip)
M-232 Compact Mike
M-235 HD Ball Screw
M-238 Ultra-High Load Precision Ball Screw Drive, Linear Encoder
Jump to the Linear Actuators and Micrometers Selection Guide!
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Micro-Translation Stages (Models M-110 / M-111 / M-112 / M-122)
- Ultra Compact
- 50 nm minimum incremental motion (7 nm design resolution)
- X, XY and XYZ Combinations
PDF File HTML Catalog Files
M-110/111/M-112 Leadscrew
M-110/111/M-112 Ballscrew
M-122 Ballscrew, Linear Encoder, Ultra Precision
Jump to the Micro-Stage Series Selection Guide!
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Linear Piezo-Motor-Driven Micro Stages (Models M-661, 662, 663, 682)
- Smallest Linear Motor-Driven Translation Stages on the Market
- Velocity to 800 mm/s
- Acceleration to 20 g
- Resolution to 0.1 µm
PDF File HTML Catalog Files
M-661/M-662 Open-Loop
M-663 Closed-Loop
M-682 Closed-Loop
M-686 Closed-Loop XY Stage with Large Aperture
P-652 Sub-Miniature Motor
OEM Piezo Motors
Jump to the Piezo Linear Motor Stages Selection Guide!
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| | Low-Cost, Long Travel Stages in 48 Variations
- Stress-Relieved Aluminum Base for Highest Stability
- Zero-Backlash Recirculating Ball Bearings
- Lead-Screw-Driven
PDF File HTML Catalog Files
M-403 High Resolution Translation Stage
M-404 High Resolution Translation Stage
M-413 High Resolution Translation Stage
M-414 High Resolution Translation Stage
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M-605 Series Translation Stages with Linear Encoders and ActiveDrive
TM
- 50 and 25 mm Versions,
- Integrated Linear Encoder (Direct Output Metrology)
- Very Compact, Low Profile, Recirculating Bearings & Ball Screws
- Integrated Servo-Amplifier
PDF File HTML Catalog Files
M-605 Precision Translation Stage
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Hybrid Ultra-Precision DC-Servo / PZT Translation Stages with 2 Nanometer Resolution
- Low Profile, Recirculating Bearings & Ball Screws
- Integrated Motion Controller / Driver, Daisy-Chain up to 27
- 100 nm minimum incremental motion
PDF File HTML Catalog Files
Hybrid 100 Millimeter X-STage
Hybrid 7 Millimeter Z-STage
Jump to the Translation Stages Selection Guide!
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M-500 Translation Stages with Linear Encoders and ActiveDriveTM
- 100 to 300 mm (12 inch) Versions
- Low Profile, Recirculating Bearings & Ball Screws
- Integrated Servo-Amplifier
- Optional Linear Encoders (Direct Output Metrology)
- Elevator Stage for Compact XYZ Combinations
PDF File HTML Catalog Files
M-501 Elevator Stage
M-511 Translation Stage
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Rotation Stages with ActiveDriveTM
- Low Profile, High Precision
- Integrated Servo-Amplifier
- Interated Hall-Effect Home Switch
PDF File
HTML Catalog Files
M-036
Precision Tangent-Arm Rotation Stages
M-037 Rotation Stages
M-060, M-061, M-062 Rotation Stages
M-116
Micro Rotation Stages with Worm Gear Drive
M-041 · M-044 Tip/Tilt Stages
- One- & Two-Axis Tilt Stages
- Zero Backlash
- Sub-µrad Resolution
- Manual and DC-Motor Drives
M-041 · M-044
Tip/Tilt Stages
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Scanning Stages with Voice-Coil Drive
- Fast Scanning & Positioning
- X and XY Versions
- Velocity up to 50 mm/sec
- Travel Range: 5 mm
PDF File HTML Catalog Files
V-106
Voice-Coil Scanning System
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Ultra-Low Inertia Hexapod Micropositioning Systems (6 Degree of Freedom Parallel-Kinematics)
PI is the leading manufacturer of Hexapods for Optics Alignment, Micro-Machining, Handling, Photonics Alignment
Engines, Medical Robots and other ultra-precise applications, with more than 10 years of experience, a great variety
of standard and custom designs and hundreds of units in the field.
Advantages of Hexapod Parallel Kinematics over "Stacked" multi-axis designs:
- Smaller Package Size
- Higher Stiffness
- Reduced Position Error Accumulation
- Better Dynamic Behavior
- Reduced Runout Errors
- More Precise Multi-axis Motion
- No Moving Cables!
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