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Precision Positioners, Micro-Positioners, Actuators, Piezomotors, Translation & Rotation Stages, Nanopositioning and more...


We provide a large variety of high-quality precision positioners & motion control equipment for industrial customers, OEM and research. Both micro-positioning and nano-positioning devices and systems are offered. In addition to motorized positioning stages and Hybrid Piezo/Servo Motor Translation stages the largest selection of Hexapod six-axis positioning systems are offered.

Linear positioners and rotary positioners can be combined into multi-axis systems. Piezo drives are available for upgrading the stages to providing better than 1nanometer resolution.

If speed and small dimensions are essential, piezo linear motor drives are often the best choice.

Hexapod Six-Axis
Micropositioning
Actuators &
Micrometers
Voice Coil
Scanning Stages
Vertical
Translation Positioners
Rotational Positioners
& Tilt Stages

6º of Freedom
Vacuum Compatible
Capacity: To 200 kg

Travel: 10 mm-50 mm
Forces to 30 N
Resolution to 50nanometer

Scanning Frequency : 10s of Hz
Velocity to 240 mm/s
Travel: 20 mm / 6 mm

ActiveDrive™ Motor
Quick Response
Travel: to 12.5 mm (1/2")

Forces to 100 kN
Sub-nm Resolution
Quick Response

Linear Translation Stages Motorized
Micro-Stages
Piezo Linear Motor Positioners Motion
Controllers
Piezo Nano Positioning
Stages

ActiveDrive™ Motor
Lead- or Ball- Screw
    Drive
Travel: 5 to 306 mm

Miniature Stages
Lead- or Ball- Screw
    Drive
Travel: to 25 millimeter or 360°

Fast Scanning
Ultrasonic Motor Drives
Compact

Servo/Stepper/
    Piezomotor Options
1-18 Channel Options
PC-Card, OEM /
    Rack-mount

1-6 Axis
Sub-nm precision
Low-Profile Options
 

Parallel kinematic precision positioning systems are more compact and achieve higher precision when motion in multiple degrees of freedom is required. PI has 20 years of experience w/ hexapod 6-Axis positioning micro-robots,

More Information...

Technology BLOG
Hexapods Brochure
Precision Miniature Translation Stages Catalog



Linear Translation Stages


Fast Miniature Linear Translation Stage w/ Integrated Optical Linear Encoder

M-122 Fast Miniature Linear Translation Stage w/ Integrated Optical Linear Encoder


  • Motion Range 25 millimeters
  • 0.1 micrometer Optical Linear Encoder for Highest Accuracy & Repeatability
  • Min. Incremental Motion to 0.2 micrometer
  • Max. Velocity 20 millimeters/s
  • Cross-Roll Bearings
  • Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes


High-Accuracy Micro-Translation Stages w/ Ballscrew Drive

M-110.2 - M-112.2 High-Resolution Miniature Translation Stages w/ Ballscrew Drive


  • Motion Ranges 5, 15 and 25 millimeters
  • MTBF 5000 h
  • Very Cost Effective
  • Min. Incremental Motion to 50nanometer
  • Max. Velocity 2 millimeters/s
  • Closed-Loop Servo Motors and Stepper Motors
  • Non-Contacting Limit Switches and Home Switches
  • Optional Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
  • Vacuum-Compatible Versions Available to 10-6 hPa


PILine Miniature Translation Stages

M-663 PILine® Miniature Translation Stages w/ Closed-Loop Ultrasonic Piezo Linear Motors


  • Smallest Translation Stage w/ Closed-Loop Linear Motor Drive and Linear Encoder
  • 20 millimeters Motion Range
  • Velocity up to 500 millimeters/s
  • Accelerations up to 20 g
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • X-Y Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions Available


Product Image -PILine Miniature Translation Stages w/ Closed-Loop Ultrasonic Piezo Linear Motors

M-664 PILine® Miniature Translation Stages w/ Closed-Loop Ultrasonic Piezo Linear Motors


  • Motion Range 25 millimeters
  • Max. Velocity 400 millimeters/s
  • Ultra-Low Profile, 15 millimeters
  • Direct Metrology Linear Encoder w/ 0.1 micrometer Resolution
  • High Guiding Accuracy w/ Cross Roller Bearings
  • Compact X-Y Combinations
  • Piezo Linear Motor w/ 6 N Drive Force
  • Self Locking at Rest
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PILine Miniature Translation Stages w/ Ultrasonic Piezo Linear Motors

M-661 - M-662 PILine® Miniature Translation Stages w/ Ultrasonic Piezo Linear Motors


  • Smallest Translation Stage w/ High-Speed Linear Motor Drive
  • 20 millimeters Motion Range
  • Velocity to 500 millimeters/s
  • Acceleration to 20 g
  • Resolution to 50 Nanometer
  • Self-Locking
  • X-Y-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa



PILine Low-Profile Translation Stages w/ Closed-Loop Ultrasonic Piezo Linear Motors

M-683 Compact Closed-Loop Translation Stage w/ High-Force Powerful Piezomotor Drive


  • Max. Velocity 350 millimeters/s
  • Low Profile: Only 21 millimeters Height
  • Compact X-Y Combination Possible
  • Up to 6 N Force Generation
  • Direct Metrology Linear Encoder, 0.1 micrometer Resolution
  • Motion Range 50 millimeters
  • Excellent Guiding Accuracy Through Cross Roller Bearings
  • PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
  • Self-Locking at Rest




Low-Profile X-Y Open-Frame Piezomotor Stage w/ Linear Encoders

M-686 Low-Profile X-Y Open-Frame Piezomotor Stage w/ Linear Encoders


  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 millimeters/s
  • 25 x 25 millimeters Motion Ranges
  • Integrated Linear Encoders w/ 0.1 micrometer Resolution
  • Compact Design; 27 millimeters Profile Height, 150 x 150 millimeters Footprint
  • Large Open Aperture 78 x 78 millimeters, 66 x 66 millimeters in Extreme Position
  • Self-Locking at Rest
  • Compatible w/ PI Piezo Nanopositioning / Scanning Stages



Product Image -Series of Miniature Translation Stages

M-311 - M-318 Miniature Translation Stages


  • Extremely Compact
  • All-Stainless-Steel Construction
  • X, X-Y and X-Y-Z Versions
  • Optional PiezoMikrometer for Nanometer Resolution
  • 4 millimeters Open Aperture
  • Linear Ball Bearings


Ultra-High-Precision, Side-Drive Stages w/ Magnetic-Kinematic Bearings

M-011 Ultra-High-Precision, Side-Drive Stages w/ Magnetic-Kinematic Bearings


  • Motion Range to 15 millimeters
  • Compact Side Drive
  • Straightness/Flatness ≤ 0.2 Micron
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micron Resolution w/ Closed-Loop Servo Motor
  • 5 Nanometer Resolution w/ Closed-Loop PZT Drive
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Ultra-High-Precision, Side-Drive Stages w/ Magnetic-Kinematic Bearings

M-014 Ultra-High-Precision, Side-Drive Stages w/ Magnetic-Kinematic Bearings


  • Motion Range 25 millimeters
  • Compact Side Drive
  • Straightness/Flatness ≤0.3 Micron
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micron Resolution w/ Closed-Loop Servo Motor
  • 5 Nanometer Resolution w/ Closed-Loop PZT Drive
  • 30 millimeters Ř Open Aperture


Translation Stages w/ Cross Roller Bearings

M-126 Translation Stages w/ Cross Roller Bearings


  • To 25 millimeters Motion Range
  • Manual, DC-Servo and Stepping-Motor Drives
  • ActiveDrive™ Option
  • Choice of of Motion Controllers
  • Cross Roller Bearings
  • <0.1 Micron Resolution
  • X-Y and X-Y-Z Combinations
  • Direction-Sensing Origin Switch
  • Non-Contacting Limit Switches


High-Accuracy Translation Stages w/ Stepper and Servo Motor Drives

M-403 High-Resolution Translation Stages w/ Stepper and Servo Motor Drives


  • Cost-Effective Design
  • Modular System w/ 4 Series: M-403, M-404, M-413, M-414
  • Preloaded Leadscrews or Recirculating Ball Screws
  • Motion Ranges from 25 to 300 millimeters
  • Stress-Relieved Al Base 80 and 120 millimeters Width
  • Smallest Measured Motion Step Size to 0.1 Micron
  • Resolution to 0.017 Micron
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High-Precision Translation Stages w/ Cross Roller Bearings

M-400 Series High-Precision Translation Stages w/ Cross Roller Bearings


  • Motion Ranges to 150 millimeters
  • Stress-Relieved Al Stage Base for Long Term Stability
  • Cross Roller Bearings
  • Manual, DC-Servo and Stepping-Motor Drives, ActiveDrive™ Option
  • Coice of Motion Controllers
  • Manual Knob for Convenient Position Adjustment
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contacting Limit Switches


Ultra-Compact, High-Accuracy Translation Stages

M-605 Ultra-Compact, High-Accuracy Translation Stages


  • Integrated Linear-Scale Encoders for Highest Accuracy
  • Motion Ranges 25 millimeters (1") and 50 millimeters (2")
  • Velocity up to 50 millimeters/sec.
  • Active Drive™ Motors
  • Coice of Motion Controllers
  • Stress-Relieved Al Stage Base for Highest Stability
  • No-Backlash Recirculating Ballscrews
  • Non-Contact, Direction-Sensing Origin Switch
  • Non-Contacting Limit Switches
  • Load Capacity 20 kg
  • >20,000 Hours MTBF


Low-Profile Translation Stages w/ Ballscrew Drives

M-505 Low-Profile Translation Stages w/ Ballscrew Drives


  • Motion Ranges to 150 millimeters (6 inches)
  • Velocity up to 50 millimeters/sec.
  • ActiveDrive™ Motors
  • Choice of of Motion Controllers
  • Stress-Relieved Al Stage Base for Highest Stability
  • No-Backlash Recirculating Ballscrews
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contacting Limit Switches
  • Load Capacity 100 kg
  • > 20,000 Hours MTBF
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Low-Profile, High-Load Translation Stages w/ Ballscrew Drives

High Load Low-Profile, Linear Translation Stages w/ Ballscrew


  • Motion Ranges to 306 millimeters (12")
  • Velocity up to 125 millimeters/sec.
  • ActiveDrive™ Motors
  • Coice of Motion Controllers
  • Linear-Scale Encoders for Highest Accuracy
  • Stress-Relieved Al Stage Base for Highest Stability
  • No-Backlash Recirculating Ballscrews
  • Non-Contacting Origin and Limit Switches
  • PIIntelliStage™ Version w/ Integrated Controller
  • Load Capacity 100 kg
  • >20000 Hours MTBF


Voice-Coil Scanning System

M-511.HD Long-Travel, High-Speed Nanopositioning Systems


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 4 Nanometer Linear Encoder Resolution
  • 100 millimeters Travel
  • Velocities to 125 millimeters/sec
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments
  • High Drive and Holding Forces w/ Minimal Power
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Voice Coil Scanning Stages
Voice-Coil Scanning System

V-106 Long-Travel, High-Dynamics Scanning System w/ Voice Coil Drives


  • Fast Scanning and Positioning
  • Scanning Frequency 10s of Hz
  • Motion Ranges of 20 millimeters and 6 millimeters
  • Velocity up to 240 millimeters/s
  • Linear Encoder Allows 0.2 Micron Repeatability
  • Available PCI-Card Controller w/ On-Board Amplifiers



Actuator & Micrometer Drives

High-Accuracy Motorized Micrometer

M-227 High-Resolution Servo Motorized Positioner


  • 10, 25 & 50 millimeters Motion Ranges
  • 0.05 Micron Smallest Measured Motion Step Size
  • Non-Rotating Tip
  • Closed-Loop Servo Motor
  • Choice of of Motion Controllers
  • Sub-Nanometer Resolution w/ Optional PZT Drive
  • >5,000 Hours MTBF

High-Precision Closed-Loop DC-Mikrometer & Stepper Actuators

M-228 - M-229 Stepper-Mikrometer Linear Actuators w/ Limit Switches


  • Cost-Efficient Design
  • To 10 millimeters or to 25 millimeters Motion Range
  • 46nanometer Resolution (w/ C-663 Controller)
  • 50 N Load Capacity
  • Non-Rotating Tip
  • Max. Velocity 1.5 millimeters/s
  • Non-Contacting Limit Switches and Home Switches Compact Design
To the Top  M-228 PDF
Parametric Search      M-229 PDF

High-Precision Closed-Loop DC-Mikrometer & Stepper Actuators

M-230 High-Resolution Closed-Loop Servo and Stepper Actuators


  • 10 & 25 millimeters Motion Range
  • 0.05 Micron Smallest Measured Motion Step Size
  • Non-Rotating Tip
  • Velocity to 2 millimeters/sec.
  • Closed-Loop Servo Motors and Stepper Motors
  • Coice of Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Front Mount or Clamp Mount
  • >5,000 Hours MTB
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High-Precision Closed-Loop Motorized Positioner

M-231 High-Resolution Closed-Loop Servo Motorized Positioner


  • 17 millimeters Motion Range
  • 0.1 Micron Smallest Measured Motion Step Size
  • Velocity up to 2.5 millimeters/sec.
  • Closed-Loop Servo Motor
  • Coice of Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF


Compact, High-Resolution, Closed-Loop DC-Mikrometer Actuator

M-232 Compact, High-Resolution, Closed-Loop DC-Mikrometer Actuator


  • 17 millimeters Motion Range
  • 0.1 Micron Smallest Measured Motion Step Size
  • Velocity up to 2.5 millimeters/sec.
  • Closed-Loop Servo Motor
  • Choice of of Motion Controllers
  • Integrated Hall-Effect Limit Switches and Home Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF


Heavy-Duty High-Resolution Closed-Loop DC-Mikrometer & Stepper Actuators

M-235 Heavy-Duty High-Resolution Closed-Loop Servo & Stepper Actuators


  • 20 millimeters or 50 millimeters Motion Range
  • 0.1 Micron Smallest Measured Motion Step Size
  • High-Speed Direct Drive Option
  • 120 N Push/Pull Load
  • 100 N Lateral Load Limit
  • Preloaded Ultra-Low-Friction Ball Screw w/ Non-Rotating Tip
  • Closed-Loop Servo Motors and Stepper Motors
  • Choice of of Motion Controllers
  • Integrated Hall-Effect Limit & Origin Switches
  • >20,000 Hours MTBF
  • Vacuum Versions
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Differential Micrometer Drives

M-238 Heavy-Duty Servo Motorized Linear Actuator


  • High Load Capacity to 400 N
  • Optional 0.1 Micron Direct Metrology Linear Encoder for Exceptional Precision
  • Motion Range to 50 millimeters
  • Smallest Measured Motion Step Size to 0.3 Micron
  • Max. Velocity: 30 millimeters/s
  • Preloaded Frictionless Ball Screw
  • MTBF > 20.000 h
  • Vacuum-Compatible Versions Available for 10-6 hPa


PILine® RodDrive Integrated Piezo Linear Motor Drive

RodDrive Integrated Piezo Linear Motor Drive


  • Drive-Component for Integration into Micropositioning Systems
  • Flexible Choice of Motion Ranges to Several 100 millimeters
  • Flexible Choice of Push/Pull Forces to Several 10 N
  • Smallest Measured Motion Step Size to 0.05 Micron
  • Velocity to 400 millimeters/s
  • Self-Locking


PiezoMikrometer: Piezoelectric Micrometer Drive

P-853 - P-854 PiezoMikrometer: Piezoelectric Micrometer Drive


  • Alternative for Standard Micrometer Drives
  • Manual Travel to 18 millimeters
  • Piezoelectric High-Resolution Travel to 25 Micron
  • Sub-Nanometer Resolution
  • Dynamic Operation to 10 Hz



Prodcut Image - NEXLINE Miniature High-Load Piezo Nanopositioning Drive

N-111 Miniature High-Accuracy Piezo Motor Nanopositioning Actuator


  • Motion Range 10 millimeters
  • Resolutionto 0.025nanometer
  • Open-Loop, 5 nanometer Closed-Loop
  • Up To 50 N Force Generation and 70 N Holding Force
  • Self Locking at Rest, No Heat Generation
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible


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EXLINE High-Load Piezo Nanopositioning Drive

N-216 High-Force Piezo Nanopositioning Linear Motor Actutators


  • Winner of the SEMI Technology Innovation Showcase Award
  • 20 millimeters Motion Range, <0.1 Nanometer Resolution (Open-Loop)
  • Integrated High-Resolution Incremental Encoder (Closed-Loop)
  • Active Force Generation to 400 N
  • >800 N Holding Force, Self-Locking


High-Precision Stepper-Mikrometer Actuators

M-168 High-Resolution Stepping-Motorized Positioner Actuators


  • 10, 25 & 50 millimeters Motion Ranges
  • Resolution <0.1 Micron
  • 2- and 5-Phase Stepper Motor
  • Manual Positioning Knob
  • Sub-Nanometer Resolution w/ Optional PZT Actuator
  • >5,000 Hours MTBF
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Micrometer Drives w/ Rotating Tips

M-619 - M-626 Micrometer Drives w/ Rotating Tips


  • 1 Micron Sensitivity
  • 10 Micron Graduations
  • Travel up to 25 millimeters
  • Model M-626.05 w/ Lockable Spindle



Precision Micrometer Drives w/ Non-Rotating Tips

M-631 Precision Micrometer Drives w/ Non-Rotating Tip


  • 10, 25 and 50 millimeters Travel
  • Pitch 0.5 millimeters/Rev.
  • Low-Friction Construction
  • 1 Micron Manual Sensitivity
  • Sub-Nanometer Resolution w/ Optional PZT Actuator


Differential Micrometer Drives

M-653 Differential Micrometer Drives


  • 0.1 Micron Sensitivity
  • 1 Micron Graduations
  • Travel to 20 millimeters



Vertical Translation Stages

Vertical Micropositioning Stage

M-501 Vertical Precision Positioner Stage


  • Motion Range 12.5 millimeters (1/2")
  • Ultra-High-Resolution Encoder
  • ActiveDrive™ Motor
  • Choice of of Motion Controllers
  • Stress-Relieved Al Stage Base for Long Term Stability
  • No-Backlash Recirculating Ballscrews
  • Non-Contact Origin and Limit Switches
  • >20,000 Hours MTBF

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Parametric Search     

Product Image -High-Load Vertical Micro-Positioning Stage

M-451 High-Load Vertical Precision Positioner Stage


  • 3 Nanometer Design Resolution
  • 12 kg Load Capacity, High Stiffness
  • <100 Nanometer Smallest Measured Motion Step Size
  • 12.5 millimeters (1/2") Motion Range
  • ActiveDrive™ Motor
  • Coice of Motion Controllers
  • Non-Contact Origin and Limit Switches
  • Mounting Platform for P-500 and PIMars™ Piezo- Nanopositioning Systems
  • Self Locking



Product Image -M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage

M-714 Long Travel Nanopositioning Hybrid Motor -Stage


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces w/ Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments





Rotation Stages & Tilt Stages

Tip/Tilt Stages

M-044 Tip/Tilt Precision Positioner


  • One- & Two-Axis Tilt Stages
  • Zero Backlash
  • Sub-microradian Resolution
  • Manual and DC-Motor Drives
  • Coice of Motion Controllers
  • Optional Piezo Drives for Tracking and Scanning
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M-660 PILine® Rotation Stage Fast Positioning, Ultra-Low Profile

M-660 PILine® Rotation Stage Fast Positioning, Ultra-Low Profile


  • Unlimited Motion Range
  • Max. Velocity 720 °/s
  • Low Profile: Only 14 millimeters in Height
  • Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
  • Direct Metrology Linear Encoder, 34 µrad Resolution PILine® Direct Drive: Non-Magnetic and Vacuum-Compatible Working Principle
  • Compact Combinations w/ Linear Stages


Micro Rotation Stages w/ Worm Gear Drive

M-116 Compact Rotation Stage, Worm Gear Driven


  • Ultra-Compact Design
  • Continuous Rotation
  • 2.5 microradian Design Resolution
  • Open Aperture
  • Velocity up to 20 degrees/second
  • Preloaded Anti-Backlash Worm Drive
  • Fits Directly on M-110 Micro Translation Stages
  • Coice of Motion Controllers
  • Non-Contact Reference Switch
  • Up to 10 microradian Repeatability


Rotation Stages w/ Worm Gear Drive

M-038 Rotation Stages w/ Worm Gear Drive (100 millimeters diameter)


  • Ultra-high preciision
  • Continuous Rotation
  • Preloaded Worm Drive for Zero Backlash
  • ActiveDrive™ DC-Motor, Stepping-Motor and Manual Versions
  • Choice of of Motion Controllers
  • Open Aperture



Compact Precision Tangent-Arm Rotation Stages w/ Optional DC-Motor and Piezo Drives

M-035 Compact Precision Tangent-Arm Rotation Stages, Optional Servo Motor / Piezo Drives


  • Sub-Microradian Resolution
  • 360o Coarse Range, up to 19o Fine Range w/ <1 microradian Resolution
  • Precision Micrometer or Servo Motor Drives
  • Piezo Option for High-Resolution Scanning and Tracking
  • Ø 20 millimeters Clear Aperture

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Precision Tangent-Arm Rotation Stages w/ Optional DC-Motor and Piezo Drives

M-036 Precision Tangent-Arm Rotation Stages, Optional Servo Motor and Piezo Drives


  • Sub-Microradian Resolution
  • 360o Coarse Range, up to 21o Fine Range
  • Precision Micrometer or Servo Motor Drives
  • Piezo Option for High-Resolution Scanning and Tracking
  • Ø 30 millimeters Open Aperture


Series Rotation Stages w/ Worm Gear Drive

M-060 Rotation Stage, Worm Gear Driven


  • Continuous Rotation
  • Ultra - high preciision
  • Velocity up to 90 deg/sec.
  • Preloaded Worm Drive for Zero Backlash
  • ActiveDrives™ DC-Motor, Stepping-Motor and Manual Versions
  • Coice of Motion Controllers
  • Direction - Sensing Origin Switch


Rotation Stages w/ Worm Gear Drive

M-037 Rotation Stages, Worm Gear Driven (60 millimeters diameter)


  • Ultra-High Resolution
  • Compact Design
  • Continuous Rotation Range
  • Preloaded Worm Drive for Zero Backlash
  • ActiveDrive™ DC-Motor, Stepper Motor and Manual Versions
  • Choice of of Motion Controllers
  • 20 millimeters ø Open Aperture

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Hexapod Six-Axis Micro-Positioning Systems

Product Image - M-824 Vacuum Hexapod

M-810 Miniature Hexapod Precision 6-Axis Positioner


  • Most-Compact Hexapod in the PI Portfolio
  • Motion Ranges 40 x 40 x 13 millimeters, Rotation to 60 Degrees
  • Load Capacity to 5 kg
  • Resolution of a Single Strut 40 nanometer
  • Min. Incremental Motion to 200 nanometer Repeatability up to ±0.5 micrometer
  • Velocity to 10 millimeters/s



Product Image - M-810 Miniature Hexapod

M-824 Compact Six-Axis Positioning System


  • Six Degrees of Freedom
  • Vacuum Compatible Versions
  • Load Capacity 10 kg
  • Motion Ranges to 45 millimeters (linear), 25° (rotation)
  • 7 Nanometer Resolution
  • 300 Nanometer Min. Incremental Motion
  • Repeatability ±0.5 Micron
  • Very Compact Design
  • Self Locking to 10 kg


6 Axis positioner

M-850 Six-Axis-Parallel Positioner


  • Six Degrees of Freedom
  • Works in Any Orientation
  • No Moving Cables for Improved Reliability and Precision
  • 200 kg Load Capacity (Vertical)
  • Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
  • Repeatability to ±1 Micron
  • Actuator Resolution to 0.005 Micron
  • Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
  • Vacuum-Compatible Versions
  • Linear and Rotary Multi-Axis Scans
  • Virtualized Center of Rotation (Pivot Point)
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF
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HexaLight 6-Axis-Parallel Kinematics Microrobot

M-840 HexaLight™ Six-Axis Positioner


  • Six Degrees of Freedom
  • Rapid Response
  • No Moving Cables for Improved Reliability and Precision
  • 10 kg Load Capacity
  • Repeatability to ±2 Micron
  • Actuator Resolution to 0.016 Micron
  • Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
  • Vacuum-Compatible Versions
  • Virtualized Pivot Point
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF
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HexAlign 6-Axis Precision Alignment System / Manipulator (Hexapod)

F-206 6-Axis Precision Fiber Alignment System


  • Parallel Kinematics w/ 6 Degrees of Freedom
  • Repeatability 0.3 Micron in Space
  • 0.033 Micron Actuator Resolution
  • No Moving Cables for Improved Reliability, Reduced Friction
  • Better Dynamics, More Compact than Serial Kinematics Systems
  • For Scanning and Fiber / Photonics Components Alignment
  • Cartesian Coordinate Control w/ Randomized Pivot Point.
  • Powerful Digital Controller w/ Open Source LabView™ Drivers, DLL Libraries...
  • Integrated Fiber Alignment Routines


6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage w/ Parallel Metrology

P-587 Six-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage w/ Parallel Metrology


  • For Scanning and Positioning in all Six Degrees of Freedom
  • 800 x 800 x 200 Micron Linear Range
  • Up to 10 mad Rotational Range
  • Precision Trajectory Control
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology w/ Capacitive Sensors for Highest Precision
  • ID-Chip for Auto Calibration Function
  • PICMA® High - Performance Multilayer Piezo Actuator Drives
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Hexapods    Piezo    Nanopositioning Catalog   Piezo Nano-Positioning and Parallel Kinematics    Ultrasonic Piezo Motors

For Nanopositioning Systems (Ultra-Precision Piezo Stages) Click Here
  • Sub-Nanometer Precision
  • Up to 6 Degrees of Freedom
  • Very Quick Response
Jump to the Nanopositioning Selection Guide!



Motorized Micropositioners


M-230 ... M-238 Precision Linear Actuators (Models M-230, M-231, M-232, .....)
  • Ultra Compact
  • 50 nanometer Smallest Measured Motion Step Size (7 nanometer design resolution)
  • Non rotating tip, ball screws, high load, high speed versions

PDF Files     
             
             
             
             
             

Jump to the Linear Actuators and Micrometers Selection Guide!


Micro-Translation Stages (Models M-110 / M-111 / M-112 / M-122)
  • Ultra Compact
  • 50 nanometer Smallest Measured Motion Step Size (7 nanometer design resolution)
  • X, X-Y and X-Y-Z Combinations

PDF File     

           
            Ballscrew Mini Stage
           


Linear Piezo-Motor-Driven Micro Stages (Models M-661, 662, 663, 682)
  • Smallest Linear Motor-Driven Translation Stages on the Market
  • Velocity to 800 millimeters/s
  • Acceleration to 20 g
  • Resolution to 0.1 micrometer

PDF File      HTML Catalog Files
             
            
            
             M-686 Closed-Loop X-Y Stage w/ Large Aperture
             Sub-Miniature Motor
            


Low-Cost, Long Travel Stages in 48 Variations
  • Stress-Relieved Al Base for Long Term Stability
  • No-Backlash Recirculating Ball Bearings
  • Lead-Screw-Driven

PDF File      HTML Catalog Files
           
            M-404 High Precision Positioning Stage
            M-413 High Precision Translation Stage
            M-414 High Resolution Positioning Stage

M-605 Series Translation Stages w/ Linear Encoders and ActiveDrive TM
  • 50 and 25 millimeters Versions,
  • Integrated Linear Encoder (Direct Output Metrology)
  • Very Compact, Low Profile, Recirculating Bearings & Ball Screws
  • Integrated Servo-Amplifier

PDF File      HTML Catalog Files
              M-605 Precision Translation Stage       

Hybrid Ultra-Precision DC-Servo / PZT Translation Stages w/ 2 Nanometer Resolution
  • Low Profile, Recirculating Bearings & Ball Screws
  • Integrated Motion Controller / Driver, Daisy-Chain up to 27
  • 100 nanometer Smallest Measured Motion Step Size

PDF File      HTML Catalog Files
             Hybrid 100 Millimeter X-Stage
             Hybrid 7 Millimeter Z-STage


M-500 Translation Stages w/ Linear Encoders and ActiveDriveTM
  • 100 to 300 millimeter(12 inch) Versions
  • Low Profile, Recirculating Bearings & Ball Screws
  • Integrated Servo-Amplifier
  • Optional Linear Encoders (Direct Output Metrology)
  • Elevator Stage for Compact X-Y-Z Combinations

PDF File      
             M-501 Elevator Stage
             M-511 Translation Stage


Rotation Stages w/ ActiveDriveTM
  • Low Profile, High Precision
  • Integrated Servo-Amplifier
  • Interated Hall-Effect Home Switch

PDF File     
             M-036 Precision Tangent-Arm Rotation Stages
             Compact Rotation Stages
             M-060, M-061, M-062 Rotation Stages
             Miniature Motorized Rotation Stages w/ Worm Gear Drive


M-041 · M-044 Tip/Tilt Stages
  • One- & Two-Axis Tilt Stages
  • Zero Backlash
  • Sub-µrad Resolution
  • Manual and DC-Motor Drives

             Tilt Stages

Voice-Coil Positioning Stage
  • Fast Scanning & Positioning
  • X and X-Y Versions
  • Velocity up to 50 millimeter/sec
  • Motion Range: 5 millimeter

PDF File      HTML Catalog Files
           V-106 Voice-Coil Scanning System

Ultra-Low Inertia Hexapod Micro-Positioning Systems (6 Degree of Freedom Parallel-Kinematics)

PI is the leading manufacturer of Hexapods for Optics Alignment, Micro-Machining, Handling, Photonics Alignment Engines, Medical Robots and other ultra-precise applications, w/ more than 10 years of experience, a great variety of standard and custom designs and hundreds of units in the field.

Advantages of Hexapod Parallel Kinematics over "Stacked" multi-axis designs:

  • Smaller Package Size
  • Higher Stiffness
  • Reduced Position Error Accumulation
  • Better Dynamic Behavior
  • Reduced Runout Errors
  • More Precise Multi-axis Motion
  • No Moving Cables!
More about Hexapods...

F-130 HybridPhotonics Alignment System


M-313.80 used in Photonics Alignment System
Hybrid Nanopositioning Systems

These positioning systems combine the advantages of ultra-low inertia, High Velocity PZT Nanopositioning systems and the long Motion Range of classical micropositioning stages. For High Velocity scanning only a very small mass needs to be moved resulting in much better response.

Advantages are:

  • Low Inertia
  • Quick Response
  • Sub-Nanometer Resolution
  • Low Cost
  • Upgradeable Design (Motors, Piezos Drives)

PDF File      
                      F-130/F-131 Hybrid Aligner
               F-130 Technote Cost-Effective OEM Alignment Workstation
              M-105 Manual/Piezo Aligner

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