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Micropositioner Systems, Actuators, Piezo Motor Stages, Translation & Rotation Stages, Hexapods and more...

PI offers a large range of high-precision Micropositioners, stages and systems for OEM and research. Our expertise spans from miniature motorized translation stages with servo motors to pen-tip sized piezo-motor stages to Hexapod 6D parallel kinematics Micropositioner systems for 1000 kg loads.

All micropositioners can be arranged to multiaxis combinations and many can be fitted with optional piezo drives for sub-nanometer resolution.

Our new line of Linear Piezo Motors and Translation Stages are the smallest on the market.

OEM Experience; See the Variety of PI Custom Stages
Reasons for Choosing PI
Technologies That Set PI Apart
Download the Micropositioner Solutions / Hexapod Catalog (PDF)
Piezo Linear Motors: PiezoWalk® vs. Ultrasonics
Download the Linear Actuator Catalog
Download the Miniature Linear Stage Catalog

M-235 Precision Linear Actuators (Models M-230, M-231, M-232, .....)
  • Ultra Compact
  • 50 nm minimum incremental motion (7 nm design resolution)
  • Non rotating tip, ball screws, high load, high speed versions

PDF Files      HTML Catalog Files
              M-227 with Optional Piezo Tip
              M-230 (10, 25 mm, non rotating tip)
              M-232 Compact Mike
              M-235 HD Ball Screw

Jump to the Linear Actuators and Micrometers Selection Guide!

Piezo Linear Actuators, Shear Actuators, Tubular Actuators
  • Sub-Nanometer Relsolution
  • Very High Forces (up to 8 Tons)
  • Sub-Millisec Response
  • Large Variety of Standard and Custom Models
  • PICMA Multilayer Type Ceramics with Ceramic Insulation
Jump to the Piezo Selection Guide!

Piezo Flexure Nanopositioning Stages
  • Sub-Nanometer Precision
  • Up to 6 Degrees of Freedom
  • Very Fast Response
Jump to the Nanopositioning Selection Guide!


Micro-Translation Stages (Models M-110 / M-111 / M-112), M-122
  • Ultra Compact
  • 50 nm minimum incremental motion (7 nm design resolution)
  • X, XY and XYZ Combinations

PDF File     HTML Catalog Files

            M-110/111/M-112 Leadscrew
            M-110/111/M-112 Ballscrew
            M-122 Ballscrew with Linear Encoder, Highest Performance


Jump to the Micro-Stage Series Selection Guide!

NEW: Piezo Linear Motor Driven Micro Stages (Models M-661, 662, 663, 682)
  • Smallest Linear Motor-Driven Translation Stages on the Market
  • Velocity to 800 mm/s
  • Acceleration to 20 g
  • Resolution to 0.1 µm

PDF File      HTML Catalog Files
             M-661/M-662 Open-Loop
             M-663 Closed-Loop
             M-664 Closed-Loop
             M-682 Closed-Loop
             OEM Piezo Motors

Jump to the Piezo Linear Motor Stages Selection Guide!

Low-Cost, Long Travel Stages
  • Stress-Relieved Aluminum Base for Highest Stability
  • Zero-Backlash Recirculating Ball Bearings
  • Lead-Screw-Driven

PDF File      HTML Catalog Files
            M-403 High Resolution Translation Stage

M-605 Series Translation Stages with Linear Encoders and ActiveDrive TM
  • 50 and 25 mm Versions,
  • Integrated Linear Encoder (Direct Output Metrology)
  • Very Compact, Low Profile, Recirculating Bearings & Ball Screws
  • Integrated Servo-Amplifier

PDF File      HTML Catalog Files
             M-605 Precision Translation Stage       

PIIntelliStage Translation Stages with Integrated Controllers
  • Low Profile, Recirculating Bearings & Ball Screws
  • Integrated Motion Controller / Driver, Daisy-Chain up to 27
  • 100 nm minimum incremental motion

PDF File      HTML Catalog Files
             PIIntelliStage

Jump to the Translation Stages Selection Guide!

M-500 Translation Stages with Linear Encoders and ActiveDriveTM
  • 100 to 300 mm (12 inch) Versions
  • Low Profile, Recirculating Bearings & Ball Screws
  • Integrated Servo-Amplifier
  • Optional Linear Encoders (Direct Output Metrology)
  • Elevator Stage for Compact XYZ Combinations

PDF File      HTML Catalog Files
             M-501 Elevator Stage
             M-511 Translation Stage


Rotation Stages with ActiveDriveTM
  • Low Profile, High Precision
  • Integrated Servo-Amplifier
  • Interated Hall-Effect Home Switch

PDF File      HTML Catalog Files
             M-036 Precision Tangent-Arm Rotation Stages
             M-037 Rotation Stages
             M-060, M-061, M-062 Rotation Stages
             M-116 Micro Rotation Stages with Worm Gear Drive


M-041 · M-044 Tip/Tilt Stages
  • One- & Two-Axis Tilt Stages
  • Zero Backlash
  • Sub-µrad Resolution
  • Manual and DC-Motor Drives

             M-041 · M-044 Tip/Tilt Stages

Scanning Stages with Voice-Coil Drive
  • Fast Scanning & Positioning
  • X and XY Versions
  • Velocity up to 50 mm/sec
  • Travel Range: 5 mm

PDF File      HTML Catalog Files
            V-106 Voice-Coil Scanning System

Ultra-Low Inertia Hexapod Micropositioner Systems (6 Degree of Freedom Parallel-Kinematics)

PI is the leading manufacturer of Hexapods for Optics Alignment, Micro-Machining, Handling, Photonics Alignment Engines, Medical Robots and other ultra-precise applications, with more than 10 years of experience, a great variety of standard and custom designs and hundreds of units in the field.

Advantages of Hexapod Parallel Kinematics over "Stacked" multi-axis designs:

  • Smaller Package Size
  • Higher Stiffness
  • Reduced Position Error Accumulation
  • Better Dynamic Behavior
  • Reduced Runout Errors
  • More Precise Multi-axis Motion
  • No Moving Cables!
More about Hexapods...

F130 Hybrid Photonics Alignment System


F-111 Photonics Alignment System
Hybrid Nanopositioning Systems

These positioning systems combine the advantages of ultra-low inertia, high-speed PZT Nanopositioning systems and the long travel range of classical Micropositioner stages. For high-speed scanning only a very small mass needs to be moved resulting in much better response.

Advantages are:

  • Low Inertia
  • Fast Response
  • Sub-Nanometer Resolution
  • Low Cost
  • Upgradeable Design (Motors, Piezos Drives)

PDF File       HTML Catalog Files
                     F-130/F-131 Hybrid Aligner
               F-130 Technote Cost-Effective OEM Alignment Workstation
              F-110 Manual/Piezo Aligner

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