Precision Positioners, Micro-Positioners, Actuators, Piezomotors, Translation & Rotation Stages, Nanopositioning and more...
We provide a large variety of high-quality precision positioners & motion control equipment for industrial customers, OEM and research. Both micro-positioning and nano-positioning devices and systems are offered. In addition to motorized positioning stages and Hybrid Piezo/Servo Motor Translation stages the largest selection of Hexapod six-axis positioning systems are offered.
Linear positioners and rotary positioners can be combined into multi-axis systems. Piezo drives are available for upgrading the stages to providing better than 1nanometer resolution.
If speed and small dimensions are essential, piezo linear motor drives are often the best choice.
Hexapod Six-Axis Micropositioning
Actuators & Micrometers
Voice Coil Scanning Stages
Vertical Translation Positioners
Rotational Positioners & Tilt Stages
6º of Freedom
Vacuum Compatible
Capacity: To 200 kg
Travel: 10 mm-50 mm
Forces to 30 N
Resolution to 50nanometer
Scanning Frequency : 10s of Hz
Velocity to 240 mm/s
Travel: 20 mm / 6 mm
ActiveDrive™ Motor
Quick Response
Travel: to 12.5 mm (1/2")
Forces to 100 kN
Sub-nm Resolution
Quick Response
Linear Translation Stages
Motorized Micro-Stages
Piezo Linear Motor Positioners
Motion Controllers
Piezo Nano Positioning Stages
ActiveDrive™ Motor
Lead- or Ball- Screw Drive
Travel: 5 to 306 mm
Miniature Stages
Lead- or Ball- Screw Drive
Travel: to 25 millimeter or 360°
Fast Scanning
Ultrasonic Motor Drives
Compact
Servo/Stepper/ Piezomotor Options
1-18 Channel Options
PC-Card, OEM / Rack-mount
1-6 Axis
Sub-nm precision
Low-Profile Options
Linear Translation Stages
M-122 Fast Miniature Linear Translation Stage w/ Integrated Optical Linear Encoder
Motion Range 25 millimeters
0.1 micrometer Optical Linear Encoder for Highest Accuracy & Repeatability
Min. Incremental Motion to 0.2 micrometer
Max. Velocity 20 millimeters/s
Cross-Roll Bearings
Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
PDF-Datasheet
M-110.2 - M-112.2 High-Resolution Miniature Translation Stages w/ Ballscrew Drive
Motion Ranges 5, 15 and 25 millimeters
MTBF 5000 h
Very Cost Effective
Min. Incremental Motion to 50nanometer
Max. Velocity 2 millimeters/s
Closed-Loop Servo Motors and Stepper Motors
Non-Contacting Limit Switches and Home Switches
Optional Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
Vacuum-Compatible Versions Available to 10-6 hPa
PDF-Datasheet
M-663 PILine® Miniature Translation Stages w/ Closed-Loop Ultrasonic Piezo Linear Motors
Smallest Translation Stage w/ Closed-Loop Linear Motor Drive and Linear Encoder
20 millimeters Motion Range
Velocity up to 500 millimeters/s
Accelerations up to 20 g
Resolution to 0.1 Micron
Integrated Direct-Metrology Linear Encoder
AutoLock Feature
X-Y Combinations Available
20,000 h MTBF
Vacuum Versions Available
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PDF-Datasheet
M-664 PILine® Miniature Translation Stages w/ Closed-Loop Ultrasonic Piezo Linear Motors
Motion Range 25 millimeters
Max. Velocity 400 millimeters/s
Ultra-Low Profile, 15 millimeters
Direct Metrology Linear Encoder w/ 0.1 micrometer Resolution
High Guiding Accuracy w/ Cross Roller Bearings
Compact X-Y Combinations
Piezo Linear Motor w/ 6 N Drive Force
Self Locking at Rest
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PDF-Datasheet
M-661 - M-662 PILine® Miniature Translation Stages w/ Ultrasonic Piezo Linear Motors
Smallest Translation Stage w/ High-Speed Linear Motor Drive
20 millimeters Motion Range
Velocity to 500 millimeters/s
Acceleration to 20 g
Resolution to 50 Nanometer
Self-Locking
X-Y-Combinations Available
20000 h MTBF
Vacuum Versions to 10-7 hPa
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PDF-Datasheet
M-683 Compact Closed-Loop Translation Stage w/ High-Force Powerful Piezomotor Drive
Max. Velocity 350 millimeters/s
Low Profile: Only 21 millimeters Height
Compact X-Y Combination Possible
Up to 6 N Force Generation
Direct Metrology Linear Encoder, 0.1 micrometer Resolution
Motion Range 50 millimeters
Excellent Guiding Accuracy Through Cross Roller Bearings
PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
Self-Locking at Rest
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PDF-Datasheet
M-686 Low-Profile X-Y Open-Frame Piezomotor Stage w/ Linear Encoders
Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 millimeters/s
25 x 25 millimeters Motion Ranges
Integrated Linear Encoders w/ 0.1 micrometer Resolution
Compact Design; 27 millimeters Profile Height, 150 x 150 millimeters Footprint
Large Open Aperture 78 x 78 millimeters, 66 x 66 millimeters in Extreme Position
Self-Locking at Rest
Compatible w/ PI Piezo Nanopositioning / Scanning Stages
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PDF-Datasheet
M-311 - M-318 Miniature Translation Stages
Extremely Compact
All-Stainless-Steel Construction
X, X-Y and X-Y-Z Versions
Optional PiezoMikrometer for Nanometer Resolution
4 millimeters Open Aperture
Linear Ball Bearings
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PDF-Datasheet
M-011 Ultra-High-Precision, Side-Drive Stages w/ Magnetic-Kinematic Bearings
Motion Range to 15 millimeters
Compact Side Drive
Straightness/Flatness ≤ 0.2 Micron
PZT Drive for Scanning and Tracking
Applications
0.1 Micron Resolution w/ Closed-Loop Servo Motor
5 Nanometer Resolution w/ Closed-Loop PZT
Drive
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PDF-Datasheet
M-014 Ultra-High-Precision, Side-Drive Stages w/ Magnetic-Kinematic Bearings
Motion Range 25 millimeters
Compact Side Drive
Straightness/Flatness ≤0.3 Micron
PZT Drive for Scanning and Tracking Applications
0.1 Micron Resolution w/ Closed-Loop Servo Motor
5 Nanometer Resolution w/ Closed-Loop PZT Drive
30 millimeters Ř Open Aperture
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PDF-Datasheet
M-126 Translation Stages w/ Cross Roller Bearings
To 25 millimeters Motion Range
Manual, DC-Servo and Stepping-Motor Drives
ActiveDrive Option
Choice of of Motion Controllers
Cross Roller Bearings
<0.1 Micron Resolution
X-Y and X-Y-Z Combinations
Direction-Sensing Origin Switch
Non-Contacting Limit Switches
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PDF-Datasheet
M-403 High-Resolution Translation Stages w/ Stepper and Servo Motor Drives
Cost-Effective Design
Modular System w/ 4 Series: M-403, M-404, M-413, M-414
Preloaded Leadscrews or Recirculating Ball Screws
Motion Ranges from 25 to 300 millimeters
Stress-Relieved Al Base 80 and 120 millimeters Width
Smallest Measured Motion Step Size to 0.1 Micron
Resolution to 0.017 Micron
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PDF-Datasheet
M-400 Series High-Precision Translation Stages w/ Cross Roller Bearings
Motion Ranges to 150 millimeters
Stress-Relieved Al Stage Base for Long Term Stability
Cross Roller Bearings
Manual, DC-Servo and Stepping-Motor Drives, ActiveDrive™ Option
Coice of Motion Controllers
Manual Knob for Convenient Position
Adjustment
Non-Contact Direction-Sensing Origin Switch
Non-Contacting Limit Switches
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PDF-Datasheet
M-605 Ultra-Compact, High-Accuracy Translation Stages
Integrated Linear-Scale Encoders for Highest
Accuracy
Motion Ranges 25 millimeters (1") and 50 millimeters (2")
Velocity up to 50 millimeters/sec.
Active Drive™ Motors
Coice of Motion Controllers
Stress-Relieved Al Stage Base for
Highest Stability
No-Backlash Recirculating Ballscrews
Non-Contact, Direction-Sensing Origin Switch
Non-Contacting Limit Switches
Load Capacity 20 kg
>20,000 Hours MTBF
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PDF-Datasheet
M-505 Low-Profile Translation Stages w/ Ballscrew Drives
Motion Ranges to 150 millimeters (6 inches)
Velocity up to 50 millimeters/sec.
ActiveDrive™ Motors
Choice of of Motion Controllers
Stress-Relieved Al Stage Base for
Highest Stability
No-Backlash Recirculating Ballscrews
Non-Contact Direction-Sensing Origin Switch
Non-Contacting Limit Switches
Load Capacity 100 kg
> 20,000 Hours MTBF
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PDF-Datasheet
High Load Low-Profile, Linear Translation Stages w/ Ballscrew
Motion Ranges to 306 millimeters (12")
Velocity up to 125 millimeters/sec.
ActiveDrive™ Motors
Coice of Motion Controllers
Linear-Scale Encoders for Highest Accuracy
Stress-Relieved Al Stage Base for Highest Stability
No-Backlash Recirculating Ballscrews
Non-Contacting Origin and Limit Switches
PIIntelliStage™ Version w/ Integrated
Controller
Load Capacity 100 kg
>20000 Hours MTBF
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PDF-Datasheet
M-511.HD Long-Travel, High-Speed Nanopositioning Systems
Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
4 Nanometer Linear Encoder Resolution
100 millimeters Travel
Velocities to 125 millimeters/sec
Active Compensation of Stick/Slip During Startup and Settling
Active Backlash Compensation
Excellent Velocity Control
Millisecond Settling to Nanometer Accuracy
Reliable Execution of Minimal Increments
High Drive and Holding Forces w/ Minimal Power
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Parametric Search
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PDF-Datasheet
Voice Coil Scanning Stages
V-106 Long-Travel, High-Dynamics Scanning System w/ Voice Coil Drives
Fast Scanning and Positioning
Scanning Frequency 10s of Hz
Motion Ranges of 20 millimeters and 6 millimeters
Velocity up to 240 millimeters/s
Linear Encoder Allows 0.2 Micron Repeatability
Available PCI-Card Controller w/ On-Board Amplifiers
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PDF-Datasheet
Actuator & Micrometer Drives
M-227 High-Resolution Servo Motorized Positioner
10, 25 & 50 millimeters Motion Ranges
0.05 Micron Smallest Measured Motion Step Size
Non-Rotating Tip
Closed-Loop Servo Motor
Choice of of Motion Controllers
Sub-Nanometer Resolution w/ Optional PZT Drive >5,000 Hours
MTBF
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PDF-Datasheet
M-228 - M-229 Stepper-Mikrometer Linear Actuators w/ Limit Switches
Cost-Efficient Design
To 10 millimeters or to 25 millimeters Motion Range
46nanometer Resolution (w/ C-663 Controller)
50 N Load Capacity
Non-Rotating Tip
Max. Velocity 1.5 millimeters/s
Non-Contacting Limit Switches and Home Switches Compact Design
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M-228 PDF
Parametric Search
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M-229 PDF
M-230 High-Resolution Closed-Loop Servo and Stepper Actuators
10 & 25 millimeters Motion Range
0.05 Micron Smallest Measured Motion Step Size
Non-Rotating Tip
Velocity to 2 millimeters/sec.
Closed-Loop Servo Motors and Stepper Motors
Coice of Motion Controllers
Integrated Hall-Effect Origin and Limit
Switches
Front Mount or Clamp Mount
>5,000 Hours MTB
To the Top Parametric Search
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PDF-Datasheet
M-231 High-Resolution Closed-Loop Servo Motorized Positioner
17 millimeters Motion Range
0.1 Micron Smallest Measured Motion Step Size
Velocity up to 2.5 millimeters/sec.
Closed-Loop Servo Motor
Coice of Motion Controllers
Integrated Hall-Effect Origin and Limit
Switches
Fits M-105 & F-110 Fiber Aligners
>5,000 Hours
MTBF
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PDF-Datasheet
M-232 Compact, High-Resolution, Closed-Loop DC-Mikrometer Actuator
17 millimeters Motion Range
0.1 Micron Smallest Measured Motion Step Size
Velocity up to 2.5 millimeters/sec.
Closed-Loop Servo Motor
Choice of of Motion Controllers
Integrated Hall-Effect Limit Switches and Home Switches
Fits M-105 & F-110 Fiber Aligners
>5,000 Hours
MTBF
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PDF-Datasheet
M-235 Heavy-Duty High-Resolution Closed-Loop Servo & Stepper Actuators
20 millimeters or 50 millimeters Motion Range
0.1 Micron Smallest Measured Motion Step Size
High-Speed Direct Drive Option
120 N Push/Pull Load
100 N Lateral Load Limit
Preloaded Ultra-Low-Friction Ball Screw w/ Non-Rotating Tip
Closed-Loop Servo Motors and Stepper Motors
Choice of of Motion Controllers
Integrated Hall-Effect Limit & Origin Switches
>20,000 Hours MTBF
Vacuum Versions
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PDF-Datasheet
M-238 Heavy-Duty Servo Motorized Linear Actuator
High Load Capacity to 400 N
Optional 0.1 Micron Direct Metrology Linear Encoder for Exceptional Precision
Motion Range to 50 millimeters
Smallest Measured Motion Step Size to 0.3 Micron
Max. Velocity: 30 millimeters/s
Preloaded Frictionless Ball Screw
MTBF > 20.000 h
Vacuum-Compatible Versions Available for 10-6 hPa
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PDF-Datasheet
RodDrive Integrated Piezo Linear Motor Drive
Drive-Component for Integration into Micropositioning Systems
Flexible Choice of Motion Ranges to Several 100 millimeters
Flexible Choice of Push/Pull Forces to Several 10 N
Smallest Measured Motion Step Size to 0.05 Micron
Velocity to 400 millimeters/s
Self-Locking
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PDF-Datasheet
P-853 - P-854 PiezoMikrometer: Piezoelectric Micrometer Drive
Alternative for Standard Micrometer Drives
Manual Travel to 18 millimeters
Piezoelectric High-Resolution Travel to 25 Micron
Sub-Nanometer Resolution
Dynamic Operation to 10 Hz
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PDF-Datasheet
N-111 Miniature High-Accuracy Piezo Motor Nanopositioning Actuator
Motion Range 10 millimeters
Resolutionto 0.025nanometer
Open-Loop,
5 nanometer Closed-Loop
Up To 50 N Force Generation and 70 N Holding Force
Self Locking at Rest, No Heat Generation
Non-Magnetic and Vacuum-Compatible Working Principle
Cleanroom Compatible
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PDF-Datasheet
N-216 High-Force Piezo Nanopositioning Linear Motor Actutators
Winner of the SEMI Technology Innovation Showcase Award
20 millimeters Motion Range, <0.1 Nanometer Resolution (Open-Loop)
Integrated High-Resolution Incremental Encoder (Closed-Loop)
Active Force Generation to 400 N
>800 N Holding Force,
Self-Locking
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PDF-Datasheet
M-168 High-Resolution Stepping-Motorized Positioner Actuators
10, 25 & 50 millimeters Motion Ranges
Resolution <0.1 Micron
2- and 5-Phase Stepper Motor
Manual Positioning Knob
Sub-Nanometer Resolution w/ Optional PZT Actuator
>5,000 Hours MTBF
To the Top Parametric Search
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PDF-Datasheet
M-619 - M-626 Micrometer Drives w/ Rotating Tips
1 Micron Sensitivity
10 Micron Graduations
Travel up to 25 millimeters
Model M-626.05 w/ Lockable Spindle
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PDF-Datasheet
M-631 Precision Micrometer Drives w/ Non-Rotating Tip
10, 25 and 50 millimeters Travel
Pitch 0.5 millimeters/Rev.
Low-Friction Construction
1 Micron Manual Sensitivity
Sub-Nanometer Resolution w/ Optional PZT
Actuator
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PDF-Datasheet
M-653 Differential Micrometer Drives
0.1 Micron Sensitivity
1 Micron Graduations
Travel to 20 millimeters
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PDF-Datasheet
Vertical Translation Stages
M-501 Vertical Precision Positioner Stage
Motion Range 12.5 millimeters (1/2")
Ultra-High-Resolution Encoder
ActiveDrive Motor
Choice of of Motion Controllers
Stress-Relieved Al Stage Base for Long Term Stability
No-Backlash Recirculating Ballscrews
Non-Contact Origin and Limit Switches
>20,000 Hours
MTBF
To the Top Parametric Search
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PDF-Datasheet
M-451 High-Load Vertical Precision Positioner Stage
3 Nanometer Design Resolution
12 kg Load Capacity, High Stiffness
<100 Nanometer Smallest Measured Motion Step Size
12.5 millimeters (1/2") Motion Range
ActiveDrive Motor
Coice of Motion Controllers
Non-Contact Origin and Limit Switches
Mounting Platform for P-500 and PIMars
Piezo- Nanopositioning Systems
Self Locking
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PDF-Datasheet
M-714 Long Travel Nanopositioning Hybrid Motor -Stage
Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
2 Nanometer Linear Encoder Resolution
High Holding Forces w/ Minimum Power Consumption, without Counterbalancing the Load
Active Compensation of Stick/Slip During Startup and Settling
Active Backlash Compensation
Excellent Velocity Control
Millisecond Settling to Nanometer Accuracy
Reliable Execution of Minimal Increments
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PDF-Datasheet
Rotation Stages & Tilt Stages
M-044 Tip/Tilt Precision Positioner
One- & Two-Axis Tilt Stages
Zero Backlash
Sub-microradian Resolution
Manual and DC-Motor Drives
Coice of Motion Controllers
Optional Piezo Drives for Tracking and
Scanning
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PDF-Datasheet
M-660 PILine® Rotation Stage Fast Positioning, Ultra-Low Profile
Unlimited Motion Range
Max. Velocity 720 °/s
Low Profile: Only 14 millimeters in Height
Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
Direct Metrology Linear Encoder, 34 µrad Resolution PILine® Direct Drive: Non-Magnetic and Vacuum-Compatible Working Principle
Compact Combinations w/ Linear Stages
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PDF-Datasheet
M-116 Compact Rotation Stage, Worm Gear Driven
Ultra-Compact Design
Continuous Rotation
2.5 microradian Design Resolution
Open Aperture
Velocity up to 20 degrees/second
Preloaded Anti-Backlash Worm Drive
Fits Directly on M-110 Micro Translation Stages
Coice of Motion Controllers
Non-Contact Reference Switch
Up to 10 microradian Repeatability
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PDF-Datasheet
M-038 Rotation Stages w/ Worm Gear Drive (100 millimeters diameter)
Ultra-high preciision
Continuous Rotation
Preloaded Worm Drive for Zero Backlash
ActiveDrive™ DC-Motor, Stepping-Motor and Manual Versions
Choice of of Motion Controllers
Open Aperture
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PDF-Datasheet
M-035 Compact Precision Tangent-Arm Rotation Stages, Optional Servo Motor / Piezo Drives
Sub-Microradian Resolution
360o Coarse Range, up to 19o Fine Range w/
<1 microradian Resolution
Precision Micrometer or Servo Motor Drives
Piezo Option for High-Resolution Scanning
and Tracking
Ø 20 millimeters Clear
Aperture
To the Top Parametric Search
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PDF-Datasheet
M-036 Precision Tangent-Arm Rotation Stages, Optional Servo Motor and Piezo Drives
Sub-Microradian Resolution
360o Coarse Range, up to 21o Fine Range
Precision Micrometer or Servo Motor Drives
Piezo Option for High-Resolution Scanning
and Tracking
Ø 30 millimeters Open Aperture
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PDF-Datasheet
M-060 Rotation Stage, Worm Gear Driven
Continuous Rotation
Ultra - high preciision
Velocity up to 90 deg/sec.
Preloaded Worm Drive for Zero Backlash
ActiveDrives DC-Motor, Stepping-Motor and Manual Versions
Coice of Motion Controllers
Direction - Sensing Origin
Switch
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PDF-Datasheet
M-037 Rotation Stages, Worm Gear Driven (60 millimeters diameter)
Ultra-High Resolution
Compact Design
Continuous Rotation Range
Preloaded Worm Drive for Zero Backlash
ActiveDrive™ DC-Motor, Stepper Motor and Manual Versions
Choice of of Motion Controllers
20 millimeters ø Open Aperture
To the Top Parametric Search
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PDF-Datasheet
Hexapod Six-Axis Micro-Positioning
Systems
M-810 Miniature Hexapod Precision 6-Axis Positioner
Most-Compact Hexapod in the PI Portfolio
Motion Ranges 40 x 40 x 13 millimeters, Rotation to 60 Degrees
Load Capacity to 5 kg
Resolution of a Single Strut 40 nanometer
Min. Incremental Motion to 200 nanometer Repeatability up to ±0.5 micrometer
Velocity to 10 millimeters/s
| PDF Datasheet
M-824 Compact Six-Axis Positioning System
Six Degrees of Freedom
Vacuum Compatible Versions
Load Capacity 10 kg
Motion Ranges to 45 millimeters (linear), 25°
(rotation)
7 Nanometer Resolution
300 Nanometer Min. Incremental Motion
Repeatability ±0.5 Micron
Very Compact Design
Self Locking to 10 kg
| PDF
M-850 Six-Axis-Parallel Positioner
Six Degrees of Freedom
Works in Any Orientation
No Moving Cables for Improved Reliability and Precision
200 kg Load Capacity (Vertical)
Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
Repeatability to ±1 Micron
Actuator Resolution to 0.005 Micron
Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
Vacuum-Compatible Versions
Linear and Rotary Multi-Axis Scans
Virtualized Center of Rotation (Pivot Point)
Sophisticated Controller Using Vector Algorithms
20000 h MTBF
To the Top Parametric Search
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PDF-Datasheet
M-840 HexaLight™ Six-Axis Positioner
Six Degrees of Freedom
Rapid Response
No Moving Cables for Improved Reliability and Precision
10 kg Load Capacity
Repeatability to ±2 Micron
Actuator Resolution to 0.016 Micron
Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
Vacuum-Compatible Versions
Virtualized Pivot Point
Sophisticated Controller Using Vector Algorithms
20000 h MTBF
To the Top Parametric Search
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PDF-Datasheet
F-206 6-Axis Precision Fiber Alignment System
Parallel Kinematics w/ 6 Degrees of Freedom
Repeatability 0.3 Micron in Space
0.033 Micron Actuator Resolution
No Moving Cables for Improved Reliability, Reduced Friction
Better Dynamics, More Compact than Serial Kinematics Systems
For Scanning and Fiber / Photonics Components Alignment
Cartesian Coordinate Control w/ Randomized Pivot Point.
Powerful Digital Controller w/ Open Source LabView™ Drivers, DLL Libraries...
Integrated Fiber Alignment Routines
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PDF-Datasheet
P-587 Six-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage w/ Parallel Metrology
For Scanning and Positioning in all Six Degrees of Freedom
800 x 800 x 200 Micron Linear Range
Up to 10 mad Rotational Range
Precision Trajectory Control
Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
Direct Metrology w/ Capacitive Sensors for Highest Precision
ID-Chip for Auto Calibration Function
PICMA® High - Performance Multilayer Piezo Actuator Drives
To the Top Parametric Search
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PDF-Datasheet
Talk to Your PI Application Engineer Today for Your Custom or Standard Solution!
Find the PI Location Closest to You
Get the new hardbound, 530
page PI Catalog
Motorized Micropositioners
M-230 ... M-238 Precision Linear Actuators (Models M-230, M-231, M-232, .....)
Ultra Compact
50 nanometer Smallest Measured Motion Step Size (7 nanometer design resolution)
Non rotating tip, ball screws, high load, high speed versions
PDF Files
Jump to the Linear Actuators and Micrometers Selection Guide!
Micro-Translation Stages (Models M-110 / M-111 / M-112 / M-122)
Ultra Compact
50 nanometer Smallest Measured Motion Step Size (7 nanometer design resolution)
X, X-Y and X-Y-Z Combinations
PDF File  
Ballscrew Mini Stage
Linear Piezo-Motor-Driven Micro Stages (Models M-661, 662, 663, 682)
Smallest Linear Motor-Driven Translation Stages on the Market
Velocity to 800 millimeters/s
Acceleration to 20 g
Resolution to 0.1 micrometer
PDF File HTML Catalog Files
M-686 Closed-Loop X-Y Stage w/ Large Aperture
Sub-Miniature Motor
Low-Cost, Long Travel Stages in 48 Variations
Stress-Relieved Al Base for Long Term Stability
No-Backlash Recirculating Ball Bearings
Lead-Screw-Driven
PDF File HTML Catalog Files
M-404 High Precision Positioning Stage
M-413 High Precision Translation Stage
M-414 High Resolution Positioning Stage
M-605 Series Translation Stages w/ Linear Encoders and ActiveDrive
TM
50 and 25 millimeters Versions,
Integrated Linear Encoder (Direct Output Metrology)
Very Compact, Low Profile, Recirculating Bearings & Ball Screws
Integrated Servo-Amplifier
PDF File HTML Catalog Files
M-605 Precision Translation Stage
Hybrid Ultra-Precision DC-Servo / PZT Translation Stages w/ 2 Nanometer Resolution
Low Profile, Recirculating Bearings & Ball Screws
Integrated Motion Controller / Driver, Daisy-Chain up to 27
100 nanometer Smallest Measured Motion Step Size
PDF File HTML Catalog Files
Hybrid 100 Millimeter X-Stage
Hybrid 7 Millimeter Z-STage
M-500 Translation Stages w/ Linear Encoders and ActiveDrive TM
100 to 300 millimeter(12 inch) Versions
Low Profile, Recirculating Bearings & Ball Screws
Integrated Servo-Amplifier
Optional Linear Encoders (Direct Output Metrology)
Elevator Stage for Compact X-Y-Z Combinations
PDF File
M-501 Elevator Stage
M-511 Translation Stage
Voice-Coil Positioning Stage
Fast Scanning & Positioning
X and X-Y Versions
Velocity up to 50 millimeter/sec
Motion Range: 5 millimeter
PDF File HTML Catalog Files
V-106 Voice-Coil Scanning System
Ultra-Low Inertia Hexapod Micro-Positioning Systems (6 Degree of Freedom Parallel-Kinematics)
PI is the leading manufacturer of Hexapods for Optics Alignment, Micro-Machining, Handling, Photonics Alignment
Engines, Medical Robots and other ultra-precise applications, w/ more than 10 years of experience, a great variety
of standard and custom designs and hundreds of units in the field.
Advantages of Hexapod Parallel Kinematics over "Stacked" multi-axis designs:
Smaller Package Size
Higher Stiffness
Reduced Position Error Accumulation
Better Dynamic Behavior
Reduced Runout Errors
More Precise Multi-axis Motion
No Moving Cables!
More about Hexapods...
F-130 HybridPhotonics Alignment System
M-313.80 used in Photonics Alignment System
Hybrid Nanopositioning Systems
These positioning systems combine the advantages of ultra-low inertia, High Velocity PZT
Nanopositioning systems and the long Motion Range of classical micropositioning stages. For
High Velocity scanning only a very small mass needs to be moved resulting in much better response.
Advantages are:
Low Inertia
Quick Response
Sub-Nanometer Resolution
Low Cost
Upgradeable Design (Motors, Piezos Drives)
PDF File
F-130/F-131 Hybrid Aligner
F-130 Technote Cost-Effective OEM Alignment Workstation
M-105 Manual/Piezo Aligner
Talk to Your PI Application Engineer Today
for Your Custom or Standard Solution!
Find the PI Location Closest to You
Get the new hardbound, 500
page PI Catalog