Micropositioners, Micropositioning Stages, Precision XY Tables and Motion Stage Systems

PI provides a large variety of high-quality X, XY, and XYZ micropositioning stages for industrial customers, OEMs, and research. Both micropositioning and nanopositioning stages are offered. In addition to motorized micropositioners and hybrid piezo/servo motor linear translation stages, PI offers a large selection of hexapod six-axis micropositioning stages.

Linear micropositioners, XY tables, and rotary positioners can be combined into multi-axis systems. Piezo drives are available for upgrading stages to better than 1 nanometer resolution. If speed and compact dimensions are essential, piezo linear motor drives are often the best choice.

Micropositioning Product Overview

Hexapod Six-Axis Micropositioners

6° of freedom
Vacuum compatible
Capacity to 200 kg

Automation Actuators

Travel: 10 mm–50 mm
Forces to 30 N
Resolution to 50 nm

Voice Coil Scanning Stages

Scanning frequency: 10s of Hz
Velocity to 240 mm/s
Travel: 20 mm / 6 mm

XYZ Gantry Stage Micropositioners

Direct-drive linear motors
Fast: to 2 m/sec
Travel: up to 2 m

Rotary Tables & Tilt Stages

Forces to 100 kN
Sub-nm resolution
Quick response

Motorized Linear Slides

ActiveDrive™ motor
Lead or ball screw drive
Travel: 5 to 306 mm

Motorized Micro-Stages

Miniature stages
Lead or ball screw drive
Travel to 25 mm or 360°

Piezo Linear Motor Positioners

Fast scanning
Ultrasonic motor drives
Compact design

Motion Controllers

Servo / stepper / piezomotor options
1–18 channel options
OEM / rack-mount options

Piezo Nanopositioning Stages

1–6 axis options
Sub-nm precision
Low-profile options

More Information

Technology Blog
Hexapods Brochure
Precision Miniature Translation Stages Catalog

Why Parallel Kinematics?

Parallel-kinematic precision micropositioning stages are compact and can achieve higher precision when motion in multiple degrees of freedom is required. Hexapod 6-axis micropositioners are especially useful for alignment, testing, photonics, metrology, and automation.

Linear Translation Stages

Fast Miniature Linear Translation Stage w/ Integrated Optical Linear Encoder

M-122 Fast Miniature Micropositioner Stage w/ Integrated Optical Linear Encoder

Motion Range 25 millimeters
0.1 micrometer Optical Linear Encoder for Highest Accuracy & Repeatability
Min. Incremental Motion to 0.2 micrometer
Max. Velocity 20 millimeters/s
Cross-Roll Bearings
Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes

Miniature Linear Stages

XYZ Gantry, 3-Axis Gantry Stage, Motorized Micropositioner

XYZ Gantry Stage Micropositioner - Motorized 3-Axis Stage, Linear Motors

Travel Ranges to 2m
Direct Drive Linear Motors
XY and XYZ (3-Axis) Gantry Stages
Max. Velocity 2m/s
Closed-Loop Linear Motors with Position Feedback
For Inspection, 3D Printing, Laser Machining, etc

Product link

3-Axis XYZ Nanopositioning Stage with Air Bearings

XYZ Motorized Air Bearing Nanopositioning Stage

10mm Travel Ranges
Compact Design
Zero Wear Air Bearings
Max. Velocity 450mm/sec
Closed-Loop Direct Drive Linear Motors with Position Feedback
For Alignment, Scanning, etc

XYZ Motorized Air Bearing Nanopositioning Stage

High-Accuracy Micro-Translation Stages w/ Ballscrew Drive

M-110.2 - M-112.2 High-Resolution Miniature Micropositioner Stages w/ Ballscrew Drive

Motion Ranges 5, 15 and 25 millimeters
MTBF 5000 h
Very Cost Effective
Min. Incremental Motion to 50nanometer
Max. Velocity 2 millimeters/s
Closed-Loop Servo Motors and Stepper Motors
Non-Contacting Limit Switches and Home Switches
Optional Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
Vacuum-Compatible Versions Available to 10-6 hPa

Miniature Linear Stages

M-663 PILine ® Compact Micropositioner Stages w/ Closed-Loop Ultrasonic Piezo Linear Motors

Smallest Translation Stage w/ Closed-Loop Linear Motor Drive and Linear Encoder
20 millimeters Motion Range
Velocity up to 500 millimeters/s
Accelerations up to 20 g
Resolution to 0.1 Micron
Integrated Direct-Metrology Linear Encoder
AutoLock Feature
X-Y Combinations Available
20,000 h MTBF
Vacuum Versions Available

Miniature Linear Stages

Miniature Linear Translation Stages w/ Closed-Loop Ultrasonic Piezo Linear Motors

PILine ® Miniature Micropositioning Stages w/ Closed-Loop Ultrasonic Piezo Linear Motors

Motion Range 25 millimeters
Max. Velocity 400 millimeters/s
Ultra-Low Profile, 15 millimeters
Direct Metrology Linear Encoder w/ 0.1 micrometer Resolution
High Guiding Accuracy w/ Cross Roller Bearings
Compact X-Y Combinations
Piezo Linear Motor w/ 6 N Drive Force
Self Locking at Rest

Miniature Linear Stages

Miniature Translation Stages w/ Ultrasonic Piezo Linear Motors

Miniature Micropositining Stages w/ Piezo Linear Motors

Compact Translation Stage w/ High-Speed Linear Motor Drive
20 millimeters Motion Range
Velocity to 500 millimeters/s
Acceleration to 20 g
Resolution to 50 Nanometer
Self-Locking
X-Y-Combinations Available
20000 h MTBF
Vacuum Versions to 10 -7 hPa

Miniature Linear Stages

Compact Closed-Loop Translation Stage w/ High-Force Powerful Piezomotor Drive

Max. Velocity 350 millimeters/s
Low Profile: Only 21 millimeters Height
Compact X-Y Combination Possible
Up to 6 N Force Generation
Direct Metrology Linear Encoder, 0.1 micrometer Resolution
Motion Range 50 millimeters
Excellent Guiding Accuracy Through Cross Roller Bearings
PILine: Non-Magnetic and Vacuum-Compatible Working Principle
Self-Locking at Rest

M-686 Low-Profile XY-Table with Open-Frame Piezomotor, Linear Encoders

Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 millimeters/s
25 x 25 millimeters Motion Ranges
Integrated Linear Encoders w/ 0.1 micrometer Resolution
Compact Design; 27 millimeters Profile Height, 150 x 150 millimeters Footprint
Large Open Aperture 78 x 78 millimeters, 66 x 66 millimeters in Extreme Position
Self-Locking at Rest
Compatible w/ PI Piezo Nanopositioning / Scanning Stages

High Precision XY-Tables

Ultra-High-Precision, Side-Drive Miropositioner w/ Magnetic-Kinematic Bearings

Ultra-High-Precision, Side-Drive Stages w/ Magnetic-Kinematic Bearings

Motion Range to 15 millimeters
Compact Side Drive
Straightness/Flatness ≤ 0.2 Micron
PZT Drive for Scanning and Tracking Applications
0.1 Micron Resolution w/ Closed-Loop Servo Motor
5 Nanometer Resolution w/ Closed-Loop PZT Drive

Ultra-High-Precision, Side-Drive Miropositioner Stages w/ Magnetic-Kinematic Bearings

Ultra-High-Precision, Side-Drive Stages w/ Magnetic-Kinematic Bearings

Motion Range 25 millimeters
Compact Side Drive
Straightness/Flatness ≤0.3 Micron
PZT Drive for Scanning and Tracking Applications
0.1 Micron Resolution w/ Closed-Loop Servo Motor
5 Nanometer Resolution w/ Closed-Loop PZT Drive
30 millimeters Open Aperture

M-126 Translation Stages w/ Cross Roller Bearings

To 25 millimeters Motion Range
Manual, DC-Servo and Stepping-Motor Drives
ActiveDrive™ Option
Choice of of Motion Controllers
Cross Roller Bearings
<0.1 Micron Resolution
X-Y and X-Y-Z Combinations
Direction-Sensing Origin Switch
Non-Contacting Limit Switches

High-Accuracy Translation Stages w/ Stepper and Servo Motor Drives

M-403 High-Resolution Translation Stages w/ Stepper and Servo Motor Drives

Cost-Effective Design
Modular System w/ 4 Series: M-403, M-404, M-413, M-414
Preloaded Leadscrews or Recirculating Ball Screws
Motion Ranges from 25 to 300 millimeters
Stress-Relieved Al Base 80 and 120 millimeters Width
Smallest Measured Motion Step Size to 0.1 Micron
Resolution to 0.017 Micron

High-Precision Translation Stages w/ Cross Roller Bearings

M-400 Series High-Precision Miropositioner Stages w/ Cross Roller Bearings

Motion Ranges to 150 millimeters
Stress-Relieved Al Stage Base for Long Term Stability
Cross Roller Bearings
Manual, DC-Servo and Stepping-Motor Drives, ActiveDrive Option
Coice of Motion Controllers
Manual Knob for Convenient Position Adjustment
Non-Contact Direction-Sensing Origin Switch
Non-Contacting Limit Switches

M-605 Ultra-Compact, High-Accuracy Translation Stages

Integrated Linear-Scale Encoders for Highest Accuracy
Motion Ranges 25 millimeters (1") and 50 millimeters (2")
Velocity up to 50 millimeters/sec.
Active Drive Motors
Coice of Motion Controllers
Stress-Relieved Al Stage Base for Highest Stability
No-Backlash Recirculating Ballscrews
Non-Contact, Direction-Sensing Origin Switch
Non-Contacting Limit Switches
Load Capacity 20 kg
>20,000 Hours MTBF

M-505 Low-Profile Miropositioner Stages w/ Ballscrew Drives

Motion Ranges to 150 millimeters (6 inches)
Velocity up to 50 millimeters/sec.
ActiveDrive Motors
Choice of of Motion Controllers
Stress-Relieved Al Stage Base for Highest Stability
No-Backlash Recirculating Ballscrews
Non-Contact Direction-Sensing Origin Switch
Non-Contacting Limit Switches
Load Capacity 100 kg
> 20,000 Hours MTBF

High Load Low-Profile, Linear Translation Stages w/ Ballscrew

Motion Ranges to 306 millimeters (12")
Velocity up to 125 millimeters/sec.
ActiveDrive Motors
Coice of Motion Controllers
Linear-Scale Encoders for Highest Accuracy
Stress-Relieved Al Stage Base for Highest Stability
No-Backlash Recirculating Ballscrews
Non-Contacting Origin and Limit Switches
PIIntelliStage Version w/ Integrated Controller
Load Capacity 100 kg
>20000 Hours MTBF

Voice-Coil, Long-Travel, High-Dynamics Scanning System

Fast Scanning and Positioning
Scanning Frequency 10s of Hz
Motion Ranges of 5, 10, 20 millimeters
Velocity up to 250 millimeters/sec
Linear Encoder 20nm Resolution

Voice-Coil Stages and Voice Coil Actuators

M-227 High-Resolution Servo Motorized Positioner

10, 25 & 50 millimeters Motion Ranges
0.05 Micron Smallest Measured Motion Step Size
Non-Rotating Tip
Closed-Loop Servo Motor
Choice of of Motion Controllers
Sub-Nanometer Resolution w/ Optional PZT Drive
>5,000 Hours MTBF

High-Precision Closed-Loop DC-Mikrometer & Stepper Actuators

M-228 - M-229 Stepper-Mikrometer Linear Actuators w/ Limit Switches

Cost-Efficient Design
To 10 millimeters or to 25 millimeters Motion Range
46nanometer Resolution (w/ C-663 Controller)
50 N Load Capacity
Non-Rotating Tip
Max. Velocity 1.5 millimeters/s
Non-Contacting Limit Switches and Home Switches Compact Design

M-230 High-Resolution Closed-Loop Servo and Stepper Actuators

10 & 25 millimeters Motion Range
0.05 Micron Smallest Measured Motion Step Size
Non-Rotating Tip
Velocity to 2 millimeters/sec.
Closed-Loop Servo Motors and Stepper Motors
Coice of Motion Controllers
Integrated Hall-Effect Origin and Limit Switches
Front Mount or Clamp Mount
>5,000 Hours MTB

High-Precision Closed-Loop Motorized Positioner

M-231 High-Resolution Closed-Loop Servo Motorized Positioner

17 millimeters Motion Range
0.1 Micron Smallest Measured Motion Step Size
Velocity up to 2.5 millimeters/sec.
Closed-Loop Servo Motor
Coice of Motion Controllers
Integrated Hall-Effect Origin and Limit Switches
Fits M-105 & F-110 Fiber Aligners
>5,000 Hours MTBF

Compact, High-Resolution, Closed-Loop DC-Mikrometer Actuator

M-232 Compact, High-Resolution, Closed-Loop DC-Micrometer Actuator

17 millimeters Motion Range
0.1 Micron Smallest Measured Motion Step Size
Velocity up to 2.5 millimeters/sec.
Closed-Loop Servo Motor
Choice of of Motion Controllers
Integrated Hall-Effect Limit Switches and Home Switches
Fits M-105 & F-110 Fiber Aligners
>5,000 Hours MTBF

Heavy-Duty High-Resolution Closed-Loop DC-Mikrometer & Stepper Actuators

M-235 Heavy-Duty High-Resolution Closed-Loop Servo & Stepper Actuators

20 millimeters or 50 millimeters Motion Range
0.1 Micron Smallest Measured Motion Step Size
High-Speed Direct Drive Option
120 N Push/Pull Load
100 N Lateral Load Limit
Preloaded Ultra-Low-Friction Ball Screw w/ Non-Rotating Tip
Closed-Loop Servo Motors and Stepper Motors
Choice of of Motion Controllers
Integrated Hall-Effect Limit & Origin Switches
>20,000 Hours MTBF
Vacuum Versions

M-238 Heavy-Duty Servo Motorized Linear Actuator

High Load Capacity to 400 N
Optional 0.1 Micron Direct Metrology Linear Encoder for Exceptional Precision
Motion Range to 50 millimeters
Smallest Measured Motion Step Size to 0.3 Micron
Max. Velocity: 30 millimeters/s
Preloaded Frictionless Ball Screw
MTBF > 20.000 h
Vacuum-Compatible Versions Available for 10- 6 hPa

RodDrive Integrated Piezo Linear Motor Drive

Drive-Component for Integration into Micropositioning Systems
Flexible Choice of Motion Ranges to Several 100 millimeters
Flexible Choice of Push/Pull Forces to Several 10 N
Smallest Measured Motion Step Size to 0.05 Micron
Velocity to 400 millimeters/s
Self-Locking

P-853 - P-854 PiezoMikrometer: Piezoelectric Micrometer Drive

Alternative for Standard Micrometer Drives
Manual Travel to 18 millimeters
Piezoelectric High-Resolution Travel to 25 Micron
Sub-Nanometer Resolution
Dynamic Operation to 10 Hz

Prodcut Image - NEXLINE Miniature High-Load Piezo Nanopositioning Drive

N-111 Miniature High-Accuracy Piezo Motor Nanopositioning Actuator

Motion Range 10 millimeters
Resolutionto 0.025nanometer
Open-Loop, 5 nanometer Closed-Loop
Up To 50 N Force Generation and 70 N Holding Force
Self Locking at Rest, No Heat Generation
Non-Magnetic and Vacuum-Compatible Working Principle
Cleanroom Compatible

NEXLINE High-Load Piezo Nanopositioning Drive

N-216 High-Force Piezo Nanopositioning Linear Motor Actutators

Winner of the SEMI Technology Innovation Showcase Award
20 millimeters Motion Range, <0.1 Nanometer Resolution (Open-Loop)
Integrated High-Resolution Incremental Encoder (Closed-Loop)
Active Force Generation to 400 N
>800 N Holding Force, Self-Locking

High-Precision Stepper-Mikrometer Actuators

High-Resolution Stepping-Motor Actuators

10, 25 & 50 millimeters Motion Ranges
Resolution <0.1 Micron
2- Stepper Motor
Manual Positioning Knob
Sub-Nanometer Resolution w/ Optional PZT Actuator

M-501 Vertical Precision Positioner Stage

Motion Range 12.5 millimeters (1/2")
Ultra-High-Resolution Encoder
ActiveDrive™ Motor
Choice of of Motion Controllers
Stress-Relieved Al Stage Base for Long Term Stability
No-Backlash Recirculating Ballscrews
Non-Contact Origin and Limit Switches
>20,000 Hours MTBF

Tip/Tilt Precision Positioners

One- & Two-Axis Tilt Stages
Zero Backlash
Sub-microradian Resolution
Piezo, Voice Coil and Linear Motor Motor Drives
Coice of Motion Controllers

Product link Tip/Tilt Precision Positioners

M-660 PILine Rotation Stage Fast Positioning, Ultra-Low Profile

Unlimited Motion Range
Max. Velocity 720 /s
Low Profile: Only 14 millimeters in Height
Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
Direct Metrology Linear Encoder, 34 rad Resolution PILine Direct Drive: Non-Magnetic and Vacuum-Compatible Working Principle
Compact Combinations w/ Linear Stages

Micro Rotation Stages w/ Worm Gear Drive

M-116 Compact Rotary Table , Worm Gear Driven

Ultra-Compact Design
Continuous Rotation
2.5 microradian Design Resolution
Open Aperture
Velocity up to 20 degrees/second
Preloaded Anti-Backlash Worm Drive
Fits Directly on M-110 Micro Translation Stages
Coice of Motion Controllers
Non-Contact Reference Switch
Up to 10 microradian Repeatability

Product link

Rotary Table w/ Worm Gear Drive (100 millimeters diameter)

Ultra-high preciision
Continuous Rotation
Preloaded Worm Drive for Zero Backlash
ActiveDrive DC-Motor, Stepping-Motor and Manual Versions
Choice of of Motion Controllers
Open Aperture

Compact Precision Tangent-Arm Rotation Stages w/ Optional DC-Motor and Piezo Drives

Compact Precision Tangent-Arm Rotary Tables, Optional Servo Motor / Piezo Drives

Sub-Microradian Resolution
360 o Coarse Range, up to 19 o Fine Range w/ <1 microradian Resolution
Precision Micrometer or Servo Motor Drives
Piezo Option for High-Resolution Scanning and Tracking
Ø 20 millimeters Clear Aperture

Precision Tangent-Arm Rotation Stages w/ Optional DC-Motor and Piezo Drives

Precision Tangent-Arm Rotation Tables, Optional Servo Motor and Piezo Drives

Sub-Microradian Resolution
360 o Coarse Range, up to 21 o Fine Range
Precision Micrometer or Servo Motor Drives
Piezo Option for High-Resolution Scanning and Tracking
Ø 30 millimeters Open Aperture

Series Rotation Stages w/ Worm Gear Drive

M-060 Rotation Stage, Worm Gear Driven

Continuous Rotation
Ultra - high preciision
Velocity up to 90 deg/sec.
Preloaded Worm Drive for Zero Backlash
ActiveDrives™ DC-Motor, Stepping-Motor and Manual Versions
Coice of Motion Controllers
Direction - Sensing Origin Switch

Motorized Rotation Tables, Worm Gear Driven (60 millimeters diameter)

Ultra-High Resolution
Compact Design
Continuous Rotation Range
Preloaded Worm Drive for Zero Backlash
ActiveDrive DC-Motor, Stepper Motor and Manual Versions
Choice of of Motion Controllers
20 millimeters ø Open Aperture

Miniature Hexapod 6-Axis Stages, Positioning System

Most-Compact Hexapod in the PI Portfolio
Motion Ranges 40 x 40 x 13 millimeters, Rotation to 60 Degrees
Load Capacity to 5 kg
Resolution of a Single Strut 40 nanometer
Min. Incremental Motion to 200 nanometer Repeatability up to 0.5 micrometer
Velocity to 10 millimeters/s

Miniature Hexapod 6-Axis Stages, Positioning System

M-824 Compact Six-Axis Positioning System

Six Degrees of Freedom
Vacuum Compatible Versions
Load Capacity 10 kg
Motion Ranges to 45 millimeters (linear), 25 (rotation)
7 Nanometer Resolution
300 Nanometer Min. Incremental Motion
Repeatability 0.5 Micron
Very Compact Design
Self Locking to 10 kg

Product link

M-850 Six-Axis-Parallel Positioner

Six Degrees of Freedom
Works in Any Orientation
No Moving Cables for Improved Reliability and Precision
200 kg Load Capacity (Vertical)
Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
Repeatability to 1 Micron
Actuator Resolution to 0.005 Micron
Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
Vacuum-Compatible Versions
Linear and Rotary Multi-Axis Scans
Virtualized Center of Rotation (Pivot Point)
Sophisticated Controller Using Vector Algorithms
20000 h MTBF

Product link

HexaLight 6-Axis-Parallel Kinematics Microrobot

M-840 HexaLight Six-Axis Positioner

Six Degrees of Freedom
Rapid Response
No Moving Cables for Improved Reliability and Precision
10 kg Load Capacity
Repeatability to 2 Micron
Actuator Resolution to 0.016 Micron
Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
Vacuum-Compatible Versions
Virtualized Pivot Point
Sophisticated Controller Using Vector Algorithms
20000 h MTBF

HexAlign 6-Axis Precision Alignment System / Manipulator (Hexapod)

F-206 6-Axis Precision Fiber Alignment System

Parallel Kinematics w/ 6 Degrees of Freedom
Repeatability 0.3 Micron in Space
0.033 Micron Actuator Resolution
No Moving Cables for Improved Reliability, Reduced Friction
Better Dynamics, More Compact than Serial Kinematics Systems
For Scanning and Fiber / Photonics Components Alignment
Cartesian Coordinate Control w/ Randomized Pivot Point.
Powerful Digital Controller w/ Open Source LabView Drivers, DLL Libraries...
Integrated Fiber Alignment Routines

6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage w/ Parallel Metrology

P-587 Six-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage w/ Parallel Metrology

For Scanning and Positioning in all Six Degrees of Freedom
800 x 800 x 200 Micron Linear Range
Up to 10 mad Rotational Range
Precision Trajectory Control
Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
Direct Metrology w/ Capacitive Sensors for Highest Precision
ID-Chip for Auto Calibration Function
PICMA ® High - Performance Multilayer Piezo Actuator Drives